DRY GAS SCRUBBER
    2.
    发明公开
    DRY GAS SCRUBBER 审中-公开

    公开(公告)号:US20230219038A1

    公开(公告)日:2023-07-13

    申请号:US18001008

    申请日:2021-05-26

    申请人: CSK INC.

    IPC分类号: B01D53/81 B01D53/04 B01D53/26

    摘要: A dry gas scrubber is disclosed. The dry gas scrubber is for treatment of an effluent stream and comprises: a chamber having an inlet for receiving the effluent stream, a cooler coupled with the inlet and configured to cool the effluent stream, and a resin chamber downstream of the cooler and configured to receive the effluent stream for treatment. In this way, the cooler is interposed between the process tool and the resin chamber and operates to cool the effluent stream prior to its being delivered to the resin chamber. Cooling the effluent stream in this way helps to improve the performance of the resin, even when the effluent stream is at an elevated temperature.