公开(公告)号：US20020109114A1

公开(公告)日：2002-08-15

申请号：US10045132

申请日：2001-10-23

Applicant: California Institute of Technology

Inventor： B. Scott Driggs ,  Markus M. Enzelberger ,  Stephen R. Quake

IPC: F16K031/02 ,  C23F001/00

CPC classification number: F16K31/02 ,  B33Y80/00 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0011 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/0078 ,  F16K2099/008

Abstract: Valve structures formed in elastomer material are electrostatically actuated by applying voltage to a flexible, electrically conductive wire pattern. An actuation force generated between the patterned wire structure and an electrode result in closure of a flow channel formed in elastomer material underlying the wire. In one embodiment of a valve structure in accordance with the present invention, the wire structure is patterned by lithography and etching of a copper/polyimide laminate, with an underlying gold plate positioned on the opposite side of the flow channel serving as an electrode. In an alternative embodiment, a first wire structure is patterned by physically cutting out a first pattern of strips from an Aluminum/Mylar laminate sheet. A second patterned wire structure serving as the electrode is formed by the same method, and positioned on the opposite side of a control channel. Application of an actuation force between the first and second patterned strips closes the control channel and an associated flow channel underlying the control channel.

Abstract translation: 弹性体材料中形成的阀结构通过将电压施加到柔性导电的导线图案而被静电致动。 在图案化的线结构和电极之间产生的致动力导致在线下方的弹性体材料中形成的流动通道的封闭。 在根据本发明的阀结构的一个实施例中，通过光刻和铜/聚酰亚胺层压板的蚀刻来对线结构进行图案化，其中下面的金板位于用作电极的流动通道的相对侧上。 在替代实施例中，通过从铝/聚酯薄膜层压板物理切割第一图案条，对第一线结构图案化。 用作电极的第二图案化线结构通过相同的方法形成，并且位于控制通道的相对侧上。 在第一和第二图案化带之间的致动力的施加关闭控制通道和控制通道下方的相关联的流动通道。