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    Multi-wavelength programmable laser processing mechanisms and apparatus utilizing spectrometer verification
    2.
    发明授权
    Multi-wavelength programmable laser processing mechanisms and apparatus utilizing spectrometer verification 失效
    使用光谱仪验证的多波长可编程激光处理机构和装置

    公开(公告)号：US5626778A

    公开(公告)日：1997-05-06

    申请号：US465688

    申请日：1995-06-06

    申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

    发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

    IPC分类号： B23K26/04 ,  H05K3/00

    CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

    摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

    摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

    Multi-wavelength programmable laser processing mechanisms and apparatus
    4.
    发明授权
    Multi-wavelength programmable laser processing mechanisms and apparatus 失效
    多波长可编程激光加工机构及装置

    公开(公告)号：US5620618A

    公开(公告)日：1997-04-15

    申请号：US430480

    申请日：1995-04-28

    申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

    发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

    IPC分类号： B23K26/04 ,  H05K3/00 ,  B23K26/08

    CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

    摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

    摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

    Interferometric measurement and alignment technique for laser scanners
    5.
    发明授权
    Interferometric measurement and alignment technique for laser scanners 失效
    激光扫描仪的干涉测量和对准技术

    公开(公告)号：US5541731A

    公开(公告)日：1996-07-30

    申请号：US444302

    申请日：1995-05-18

    申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

    发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

    IPC分类号： B23K26/04 ,  H05K3/00 ,  G01B9/02

    CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

    摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Evaluation and alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

    摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪光束的评估和对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

    Variable magnification laser imaging system
    6.
    发明授权
    Variable magnification laser imaging system 失效
    变倍激光成像系统

    公开(公告)号：US5448410A

    公开(公告)日：1995-09-05

    申请号：US923284

    申请日：1992-07-31

    申请人： Candace J. Freedenberg ,  Frederick A. Herring ,  Uldis A. Ziemins

    发明人： Candace J. Freedenberg ,  Frederick A. Herring ,  Uldis A. Ziemins

    IPC分类号： B23K26/06 ,  G02B15/16 ,  G02B15/14

    CPC分类号： G02B15/16 ,  B23K26/06 ,  B23K26/0604 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0665 ,  Y10S359/90

    摘要： A train of air spaced optical mechanisms capable of taking a raw laser beam and focusing it on a workpiece for a range of cut sizes with varying magnifications and energy densities while controlling divergence and providing optimum uniformity. The lenses are diffraction limited for optimum uniformity and edge definition. The system uses variable down collimators to condense the beam to an aperture plane. The aperture is then imaged to the workpiece with Barlow, zoom transfer, collimator, and objective lenses. The components are color corrected to aid in alignment of an invisible beam and allow the aperture to be imaged to a workpiece in visible light.

    摘要翻译： 一排空气隔开的光学机构，能够获取原始的激光束并将其聚焦在工件上，以便在具有不同放大倍数和能量密度的一系列切割尺寸的同时，同时控制发散并提供最佳的均匀性。 透镜被衍射限制，以获得最佳均匀性和边缘定义。 该系统使用可变向下准直器将光束冷凝到光阑平面。 然后通过Barlow，变焦传输，准直仪和物镜将孔径成像到工件。 组件被颜色校正以帮助不可见光束的对准，并允许光圈在可见光下成像到工件。

    Superachromatic UV and visible focusing objective lens
    8.
    发明授权
    Superachromatic UV and visible focusing objective lens 失效
    超吸收紫外和可见聚焦物镜

    公开(公告)号：US5305138A

    公开(公告)日：1994-04-19

    申请号：US923283

    申请日：1992-07-31

    申请人： Candace J. Freedenberg ,  Frederick A. Herring ,  Uldis A. Ziemins

    发明人： Candace J. Freedenberg ,  Frederick A. Herring ,  Uldis A. Ziemins

    IPC分类号： G02B1/00 ,  G02B1/02 ,  G02B13/14 ,  G02B13/24 ,  G02B9/08 ,  G02B9/12 ,  G02B13/00

    CPC分类号： G02B13/143

    摘要： A superachromatic focusing objective lens which focuses wavelengths extending between the ultraviolet and the visible wavelength spectrum and is able to achieve superachromatic correction for three wavelengths within the visible spectrum is disclosed. The present objective lens includes an achromatic lens to assist in the correction spherical and coma aberration, a modified gauss for minimizing spherochromatism, a reversed modified gauss for adding symmetry to aid in the correction of coma, distortion and lateral color aberrations, and a stop located between the modified gauss and the reverse modified gauss. A glass plate is provided for forming a splatter shield to protect the lens from debris, and may be used to define one wall of a vacuum chamber. The elements of the objective lens may be made from various glasses to include calcium fluoride, quartz, and barium fluoride.

    摘要翻译： 公开了一种聚焦物镜，其聚焦在紫外线和可见波长光谱之间延伸的波长，并且能够对可见光谱内的三个波长实现超色度校正。 本物镜包括有助于校正球面和彗形像差的消色差透镜，用于最小化球面色差的改进高斯，用于增加对称性以帮助校正彗差，变形和侧向色差的反向改变的高斯和位于 在改良高斯与反向修正高斯之间。 提供玻璃板以形成溅射屏蔽以保护镜片不被碎屑，并可用于限定真空室的一个壁。 物镜的元件可以由各种玻璃制成，以包括氟化钙，石英和氟化钡。

    Synchronized XY laser scanner
    10.
    发明授权
    Synchronized XY laser scanner 失效
    同步XY激光扫描仪

    公开(公告)号：US5504612A

    公开(公告)日：1996-04-02

    申请号：US443634

    申请日：1995-05-18

    申请人： Joshua M. Cobb ,  James H. Covell, II ,  Franz X. Topolovec ,  Uldis A. Ziemins

    发明人： Joshua M. Cobb ,  James H. Covell, II ,  Franz X. Topolovec ,  Uldis A. Ziemins

    IPC分类号： B41J2/44 ,  B23K26/08 ,  G02B26/10 ,  H01L21/027 ,  H01L21/268 ,  G02B26/08

    CPC分类号： G02B26/101 ,  Y10S359/90

    摘要： An apparatus and method are disclosed for laser raster scanning a substrate in an XY plane wherein a single motor is used to provide synchronized X-Y scanning by two mirrors positioned orthogonally and which move linearly in an XY plane relative to each other by the rotation of the motor shaft. A preferred embodiment uses a specially designed cam to provide back and forth laser scanning motion and an intermittent gear to provide indexing of the laser. The apparatus and method may be configured for various scan speeds, spot sizes, Y-axis indexing and X-axis scan at the object plane. Over scanning of the active XY area of the object plane is preferred to provide constant velocity and energy density over the active XY area.

    摘要翻译： 公开了用于在XY平面中激光光栅扫描基板的装置和方法，其中使用单个电机来提供通过正交定位的两个反射镜同步的XY扫描，并且通过电动机的旋转在XY平面中相对于彼此线性移动 轴。 优选实施例使用专门设计的凸轮来提供来回激光扫描运动和间歇齿轮以提供激光的分度。 该装置和方法可以被配置用于在物平面处的各种扫描速度，光斑尺寸，Y轴分度和X轴扫描。 在对象平面的主动XY区域的扫描是优选的，以在主动XY区域上提供恒定的速度和能量密度。