-
公开(公告)号：US20090115075A1
公开(公告)日：2009-05-07
申请号：US12336994
申请日：2008-12-17
IPC分类号： H01L21/302 , B32B9/04 , H01L23/28
CPC分类号： B32B37/12 , B24B7/228 , B32B2310/0806 , B32B2457/14 , H01L21/6835 , H01L21/6836 , H01L2221/68327 , H01L2221/68381 , H01L2221/68386 , Y10T428/31663
摘要： Provided is a laminated body comprising a substrate to be ground and a support, where the substrate may be ground to a very small (thin) thickness and can then be separated from the support without damaging the substrate. One embodiment is a laminated body comprising a substrate to be ground, a curable silicone adhesive layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the adhesive layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.
摘要翻译： 提供了一种层叠体，其包括待研磨的基底和支撑体，其中基底可被研磨成非常小（薄）的厚度，然后可以与支撑体分离而不损坏基底。 一个实施方案是一种层压体，其包括待研磨的基材，与待研磨基材接触的可固化的硅氧烷粘合剂层，包含光吸收剂和可热分解树脂的光热转换层和透光载体。 在与粘合剂层接触的基板表面研磨后，通过透光层照射层叠体，分解光热转换层，分离基板和透光支撑体。
-
2.发明申请LAMINATE BODY, AND METHOD FOR MANUFACTURING THIN SUBSTRATE USING THE LAMINATE BODY 审中-公开层合体，以及使用层压体制造薄基材的方法公开(公告)号：US20080014532A1
公开(公告)日：2008-01-17
申请号：US11457567
申请日：2006-07-14
IPC分类号： G03C5/00
CPC分类号： B32B37/12 , B24B7/228 , B32B2310/0806 , B32B2457/14 , H01L21/6835 , H01L21/6836 , H01L2221/68327 , H01L2221/68381 , H01L2221/68386 , Y10T428/31663
摘要： Provided is a laminated body comprising a substrate to be ground and a support, where the substrate may be ground to a very small (thin) thickness and can then be separated from the support without damaging the substrate. One embodiment is a laminated body comprising a substrate to be ground, a curable silicone adhesive layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the adhesive layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.
摘要翻译： 提供了一种层叠体，其包括待研磨的基底和支撑体，其中基底可被研磨成非常小（薄）的厚度，然后可以与支撑体分离而不损坏基底。 一个实施方案是一种层压体，其包括待研磨的基材，与待研磨基材接触的可固化的硅氧烷粘合剂层，包含光吸收剂和可热分解树脂的光热转换层和透光载体。 在与粘合剂层接触的基板表面研磨后，通过透光层照射层叠体，分解光热转换层，分离基板和透光支撑体。
-
搜索结果
2 条记录 (耗时 0.024 秒)
