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公开(公告)号:US20170205715A1
公开(公告)日:2017-07-20
申请号:US15478709
申请日:2017-04-04
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
CPC分类号: G03F7/70383 , G03F7/70683 , G03F9/7007 , G03F9/7011
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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公开(公告)号:US10310385B2
公开(公告)日:2019-06-04
申请号:US15994068
申请日:2018-05-31
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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公开(公告)号:US09989862B2
公开(公告)日:2018-06-05
申请号:US15478709
申请日:2017-04-04
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
CPC分类号: G03F7/70383 , G03F7/70683 , G03F9/7007 , G03F9/7011
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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公开(公告)号:US20180275528A1
公开(公告)日:2018-09-27
申请号:US15994068
申请日:2018-05-31
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
CPC分类号: G03F7/70383 , G03F7/70683 , G03F9/7007 , G03F9/7011
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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