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公开(公告)号:US20180275528A1
公开(公告)日:2018-09-27
申请号:US15994068
申请日:2018-05-31
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
CPC分类号: G03F7/70383 , G03F7/70683 , G03F9/7007 , G03F9/7011
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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公开(公告)号:US10310385B2
公开(公告)日:2019-06-04
申请号:US15994068
申请日:2018-05-31
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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公开(公告)号:US09989862B2
公开(公告)日:2018-06-05
申请号:US15478709
申请日:2017-04-04
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
CPC分类号: G03F7/70383 , G03F7/70683 , G03F9/7007 , G03F9/7011
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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公开(公告)号:US20160003777A1
公开(公告)日:2016-01-07
申请号:US14771463
申请日:2014-02-14
IPC分类号: G01N29/06
CPC分类号: G01N29/0654 , G01N29/2418 , G01N29/44
摘要: The invention relates to a recording device comprising an excitation module (2, 10; 9, 10) which stimulates the sample (3) for emitting pressure waves, an acoustic module (9, 10) for detecting the generated pressure waves, and a control module (10) which determines an acoustic image based on the data from the acoustic module (9, 10). Said recording device also comprises a reproduction module (5) for optically reproducing the sample (3) and the control module (10) determines a sample limit and/or a segment limit within the sample (3) based on the optical reproduction of the sample (3) and when the acoustic image is detected, the determined sample limit and/or segment limit are taken into consideration.
摘要翻译: 本发明涉及一种记录装置,包括:激发模块(2,10; 9,10),其激发用于发射压力波的样品(3);用于检测产生的压力波的声学模块(9,10);以及控制 模块(10),其基于来自声学模块(9,10)的数据确定声学图像。 所述记录装置还包括用于光学地再现样品(3)的再现模块(5),并且控制模块(10)基于样品的光学再现来确定样品(3)内的样品极限和/或片段极限 (3),并且当检测到声学图像时,考虑所确定的样本极限和/或分段极限。
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公开(公告)号:US20170205715A1
公开(公告)日:2017-07-20
申请号:US15478709
申请日:2017-04-04
申请人: Carl Zeiss AG
发明人: Philipp Huebner , Gerhard Krampert , Stefan Richter , Timo Mappes
CPC分类号: G03F7/70383 , G03F7/70683 , G03F9/7007 , G03F9/7011
摘要: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.
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