公开(公告)号：US20130329284A1

公开(公告)日：2013-12-12

申请号：US13966714

申请日：2013-08-14

申请人： Carl Zeiss Microlmaging GmbH

发明人： Michael SCHWERTNER ,  Ralf Wolleschensky ,  Michael Kempe

IPC分类号： G02B21/06

CPC分类号： G02B21/14 ,  G02B21/0024 ,  G02B21/06

摘要： A method for the optical detection of an illuminated specimen, wherein the illuminating light impinges in a spatially structured manner in at least one plane on the specimen and several images of the specimen are acquired by a detector in different positions of the structure on the specimen. An optical sectional image and/or an image with enhanced resolution is then calculated. The method includes generating a diffraction pattern in the direction of the specimen in or near the pupil of the objective lens or in a plane conjugate to the pupil. A phase plate with regions of varying phase delays is dedicated to the diffraction pattern in or near the pupil of the objective lens or in a plane conjugate to said pupil, and different phase angles of the illuminating light are set.

摘要翻译： 一种用于照射样本的光学检测的方法，其中所述照明光以空间结构的方式照射在所述样本上的至少一个平面中，并且所述样本的多个图像由所述样本上的所述结构的不同位置的检测器获取。 然后计算出具有增强的分辨率的光学截面图像和/或图像。 该方法包括在物镜的瞳孔中或其附近或在与瞳孔共轭的平面中的样本的方向上产生衍射图案。 具有不同相位延迟的区域的相位板专用于物镜的光瞳中或附近的衍射图案或与所述瞳孔共轭的平面，并且设定照明光的不同相位角。