公开(公告)号：US20220230843A1

公开(公告)日：2022-07-21

申请号：US17458771

申请日：2021-08-27

申请人： Carl Zeiss Microscopy GmbH

发明人： Alexander Orchowski

IPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/304

摘要： The system described herein relates to a method for operating a beam apparatus, such as a particle beam apparatus or laser beam apparatus, a computer program product and a beam apparatus for carrying out the method, and to an object holder for an object that, for example, is able to be arranged in a particle beam apparatus. The method includes generating a marking on an object holder using a laser beam of a laser beam device and/or using a particle beam of the particle beam apparatus, where the particle beam includes charged particles, arranging an object on the object holder, moving the object holder, positioning the particle beam and/or the laser beam in relative fashion in relation to the object using the marking, and processing, imaging and/or analyzing the object using the particle beam and/or the laser beam.

公开(公告)号：US11688583B2

公开(公告)日：2023-06-27

申请号：US17458771

申请日：2021-08-27

申请人： Carl Zeiss Microscopy GmbH

发明人： Alexander Orchowski

IPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/304

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/3045 ,  H01J2237/20221 ,  H01J2237/2802 ,  H01J2237/30494

摘要： The system described herein relates to a method for operating a beam apparatus, such as a particle beam apparatus or laser beam apparatus, a computer program product and a beam apparatus for carrying out the method, and to an object holder for an object that, for example, is able to be arranged in a particle beam apparatus. The method includes generating a marking on an object holder using a laser beam of a laser beam device and/or using a particle beam of the particle beam apparatus, where the particle beam includes charged particles, arranging an object on the object holder, moving the object holder, positioning the particle beam and/or the laser beam in relative fashion in relation to the object using the marking, and processing, imaging and/or analyzing the object using the particle beam and/or the laser beam.