公开(公告)号：US20150362340A1

公开(公告)日：2015-12-17

申请号：US14834561

申请日：2015-08-25

申请人： Carl Zeiss SMT GmbH

发明人： Anton Montagne

IPC分类号： G01D5/22

CPC分类号： G01D5/2275 ,  G01D5/225 ,  G03F7/70141 ,  G03F7/70258 ,  G03F7/7085

摘要： A position sensor for detecting a position of a measurement object, in particular of an optical element of a lithography apparatus is suggested, which includes a transmission coil, a reception coil, which is arranged in such a way that when a transmission signal (Vt, It) is applied to the transmission coil, a reception voltage (Vz, Vx) is generated at the reception coil, and an evaluation device, which links a transmission voltage signal generated in a manner dependent on the transmission signal with a reception voltage signal generated in a manner dependent on the reception voltage and generates a sensor output signal containing information about the relative position of the measurement object with respect to the coils of the position sensor.

摘要翻译： 提出了一种用于检测测量对象的位置的位置传感器，特别是用于光刻设备的光学元件的位置，其包括传输线圈，接收线圈，其以如下方式布置：当发送信号（Vt， 它）被施加到发送线圈，在接收线圈处产生接收电压（Vz​​，Vx），并且将以取决于发送信号的方式生成的发送电压信号与产生的接收电压信号相关联的评估装置 以取决于接收电压的方式，并且生成包含关于测量对象相对于位置传感器的线圈的相对位置的信息的传感器输出信号。