公开(公告)号：US09850945B2

公开(公告)日：2017-12-26

申请号：US14809576

申请日：2015-07-27

申请人： Bertrand Haffray ,  Olivier Lemarchand

发明人： Bertrand Haffray ,  Olivier Lemarchand

IPC分类号： F16C32/04 ,  G01D5/20 ,  G01D5/22

CPC分类号： F16C32/0446 ,  F16C32/0455 ,  G01D5/2013 ,  G01D5/225

摘要： A position detection device of active magnetic bearings (AMB's) maintaining the position of a rotating shaft and comprising two sensing inductance coils, the position detection device comprising a programmable digital component for generating a 25 KHz square waveform signal, a current amplifier receiving the 25 KHz square waveform signal and injecting two identical control currents in the two sensing inductance coils, a differential amplifier for amplifying a voltage difference between the resulting voltages in the two sensing inductance coils and, depending on the displacement of the rotating shaft, an analog to digital (A/D) converter for delivering a position value from the voltage difference.

公开(公告)号：US20120303305A1

公开(公告)日：2012-11-29

申请号：US13495636

申请日：2012-06-13

申请人： Johan Bergqvist ,  Sietse Wouters

发明人： Johan Bergqvist ,  Sietse Wouters

IPC分类号： G01R27/32 ,  G06F19/00

CPC分类号： G01D5/2208 ,  G01D5/225

摘要： An electronic circuit detecting proximity includes an excitation coil emitting an inductive excitation field toward a target. A first pair of detection coils obtains a first differential inductive signal that is modified by a transition of the target within the inductive field. An out-of phase second pair of detection coils obtains a second differential inductive signal that is modified by a transition of the target within the inductive field. A comparator generates a transition signal when the difference between the first and second differential signals reaches a threshold value. A stationary target, in a ferromagnetic or conductive material, creates an offset to the signals at the outlet of the coil pairs. The offset is decreased during the presence of a movable target within the same type of material or increased during the presence of a movable target within another type of material. A comparator detects the offset level.

摘要翻译： 电子电路检测接近度包括向目标发射感应激励场的激励线圈。 第一对检测线圈获得由感应场内的目标的转变修改的第一差分电感信号。 异相第二对检测线圈获得由感应场内的目标的转变修改的第二差分感应信号。 当第一和第二差分信号之间的差达到阈值时，比较器产生转换信号。 在铁磁或导电材料中的固定靶产生对线圈对出口处的信号的偏移。 在相同类型的材料中的可移动目标的存在期间偏移减小，或者在另一种类型的材料中的可移动目标的存在期间增加。 比较器检测偏移电平。

公开(公告)号：US06849979B2

公开(公告)日：2005-02-01

申请号：US10480605

申请日：2002-06-13

申请人： Maurice Brunet ,  Ulrich Schroeder

发明人： Maurice Brunet ,  Ulrich Schroeder

IPC分类号： F16C32/04 ,  F16C39/06 ,  H02K7/09

CPC分类号： F16C32/0446 ,  F16C32/0461 ,  F16C32/048 ,  G01D5/225

摘要： The active magnetic bearing (1) comprises a stator (2) fitted with electromagnet windings (21) and a first stack of ferromagnetic laminations (22), a rotor (3) fitted with a second stack of ferromagnetic laminations (9), servo-control circuits (10), and position detectors (4, 5, 6). The first stack of ferromagnetic laminations (22) comprises in succession in the axial direction: at least a first sub-set (2a) of laminations (22a) presenting first notches housing electromagnet windings (21); a second sub-set (2b) of laminations (22b) presenting both first notches housing electromagnet windings (21) and second notches housing a radial detector (6); and a third sub-set (2a) of laminations (22a) presenting first notches housing electromagnet windings (21). The first stack of ferromagnetic laminations (22) further comprises fourth and fifth sub-sets (2c) of laminations (22c) at its ends, presenting the same notches as each other and housing respective first and second axial detectors (4, 5).

摘要翻译： 主动磁轴承（1）包括装有电磁铁绕组（21）的定子（2）和铁磁叠片（22）的第一叠层，装配有铁磁叠片（9）的第二叠层的转子（3） 控制电路（10）和位置检测器（4,5,6）。 铁磁叠片（22）的第一堆叠在轴向方向上依次包括：至少第一叠片（22a）的第一子组（2a），其呈现容纳电磁绕组（21）的第一凹口; 叠层（22b）的第二子集（2b），其呈现容纳电磁体绕组（21）的第一凹口和容纳径向探测器（6）的第二凹口; 以及呈现存放电磁铁绕组（21）的第一凹口的叠片（22a）的第三子组（2a）。 铁磁叠片（22）的第一堆叠还在其端部包括叠片（22c）的第四和第五子组（2c），呈现彼此相同的凹口，并容纳相应的第一和第二轴向检测器（4,5）。

公开(公告)号：US20040164632A1

公开(公告)日：2004-08-26

申请号：US10480605

申请日：2003-12-11

发明人： Maurice Brunet ,  Ulrich Schroeder

IPC分类号： H02K007/09

CPC分类号： F16C32/0446 ,  F16C32/0461 ,  F16C32/048 ,  G01D5/225

摘要： The active magnetic bearing (1) comprises a stator (2) fitted with electromagnet windings (21) and a first stack of ferromagnetic laminations (22), a rotor (3) fitted with a second stack of ferromagnetic laminations (9), servo-control circuits (10), and position detectors (4, 5, 6). The first stack of ferromagnetic laminations (22) comprises in succession in the axial direction: at least a first sub-set (2a) of laminations (22a) presenting first notches housing electromagnet windings (21); a second sub-set (2b) of laminations (22b) presenting both first notches housing electromagnet windings (21) and second notches housing a radial detector (6); and a third sub-set (2a) of laminations (22a) presenting first notches housing electromagnet windings (21). The first stack of ferromagnetic laminations (22) further comprises fourth and fifth sub-sets (2c) of laminations (22c) at its ends, presenting the same notches as each other and housing respective first and second axial detectors (4, 5).

摘要翻译： 主动磁轴承（1）包括装有电磁铁绕组（21）的定子（2）和铁磁叠片（22）的第一叠层，装配有铁磁叠片（9）的第二叠层的转子（3） 控制电路（10）和位置检测器（4,5,6）。 铁磁叠片（22）的第一堆叠在轴向方向上依次包括：至少第一叠片（22a）的第一子组（2a），其呈现容纳电磁绕组（21）的第一凹口; 叠层（22b）的第二子集（2b），其呈现容纳电磁体绕组（21）的第一凹口和容纳径向探测器（6）的第二凹口; 以及呈现存放电磁铁绕组（21）的第一凹口的叠片（22a）的第三子组（2a）。 铁磁叠片（22）的第一堆叠还在其端部包括叠片（22c）的第四和第五子组（2c），呈现彼此相同的凹口，并容纳相应的第一和第二轴向检测器（4,5）。

公开(公告)号：US5204621A

公开(公告)日：1993-04-20

申请号：US651450

申请日：1991-02-07

申请人： Michael Hermann ,  Johann von der Heide ,  Hans-Dieter Papst ,  Uwe Mueller

发明人： Michael Hermann ,  Johann von der Heide ,  Hans-Dieter Papst ,  Uwe Mueller

IPC分类号： G01D5/20 ,  G01D5/22

CPC分类号： G01D5/2046 ,  G01D5/225

摘要： A position sensor using a soft magnetic core and a permanent magnet for detecting linear or rotary movements of a part. In one embodiment, a differential transformer is provided with corresponding windings 3, 4 and 5, which are wound on a tubular carrier member 2. Provided inside the carrier member 2 are a saturatable core 6 with a V-shaped crosssection section and a control magnet 8 which slides on the inner surfaces. The core 6 is partially saturated on the contact surfaces, so that a virtual air gap is produced, so that the transformation ratio between the windings 3 and 4, 5 is controlled as a function of position. Other versions employ flat and/or meandering coil arrangements and, in two instances, rotational relative motion.

摘要翻译： 使用软磁芯和用于检测零件的线性或旋转运动的永磁体的位置传感器。 在一个实施例中，差动变压器设置有相应的绕组3,4和5，它们缠绕在管状载体构件2上。在载体构件2的内部是具有V形横截面的可饱和芯6和控制磁体 8在内表面上滑动。 芯6在接触表面上部分饱和，从而产生虚拟气隙，使得绕组3和4,5之间的相变比被控制为位置的函数。 其他形式采用平面和/或曲折线圈装置，并且在两种情况下采用旋转相对运动。

公开(公告)号：US4156223A

公开(公告)日：1979-05-22

申请号：US898584

申请日：1978-04-21

申请人： John D. Spindler

发明人： John D. Spindler

IPC分类号： G01D5/20 ,  G01D5/22 ,  H01F21/06 ,  G08C19/06

CPC分类号： G01D5/225 ,  G01D5/2241 ,  H01F21/06

摘要： An improved positional transducer is disclosed which utilizes an elongated, hollow, cylindrical tube of a magnetically saturable material, a sense wire that runs through the tube parallel to its elongated axis and a pair of elongated, generally rectangular shaped magnets of opposite polarity which are closely positioned adjacent diametrically opposite exterior portions of the tube. As the magnets move over in the tube, they provide substantially complete saturation of the tube in the portion over which they extend while the remaining portion of the tube remains unsaturated thereby giving a linear indication of the position of the magnets with respect to the tube. In the improved version, shown herein, adjustments of the electrical slope (volts/inches of travel) are achieved by a slot cut through the wall of the tube in the direction of the tube's length.

摘要翻译： 公开了一种改进的位置传感器，其利用可磁饱和材料的细长的，中空的圆柱形管，平行于其细长轴线延伸通过管的感测线，以及一对相对极性的细长的大致矩形的磁体， 定位在管的径向相对的外部部分。 当磁体在管中移动时，它们在其延伸的部分中提供管的基本上完全饱和，而管的剩余部分保持不饱和，从而给出磁体相对于管的位置的线性指示。 在这里所示的改进版本中，电斜率（伏/英寸行程）的调整是通过在管的长度方向上穿过管的壁的槽来实现的。

公开(公告)号：US3890607A

公开(公告)日：1975-06-17

申请号：US32440273

申请日：1973-01-17

申请人： MERLIN GERIN

发明人： PELENC YVES ,  AMBIER JEAN ,  LAVERGNE ROGER

IPC分类号： G01D5/22 ,  G21C17/12 ,  G08C19/08

CPC分类号： G21C17/12 ,  G01D5/225

摘要： An electromagnetic position indicator to continuously indicate the position of a linearly movable mobile, such as a nuclear reactor control rod, operatively connected to magnetic core means which vary the inductive coupling between primary and secondary windings. One of the windings, preferably the secondary winding comprises pairs of oppositely connected coils spaced apart in the direction of movement of the core means to improve the measurement precision. Analog or digital means may be provided to process the output signal.

摘要翻译： 电磁位置指示器，用于连续地指示可操作地连接到磁芯装置的线性移动移动体（例如核反应堆控制杆）的位置，该磁芯装置改变主次绕组与次级绕组之间的电感耦合。 绕组中的一个，优选次级绕组包括成对的沿着芯装置的运动方向间隔开的相反连接的线圈，以提高测量精度。 可以提供模拟或数字装置来处理输出信号。

公开(公告)号：US3818401A

公开(公告)日：1974-06-18

申请号：US35057773

申请日：1973-04-12

申请人： FUJI ELECTRIC CO LTD

发明人： MOURI M ,  AOKI K

IPC分类号： G01D5/20 ,  G01D5/22 ,  H01F21/00

CPC分类号： G01D5/2066 ,  G01D5/225

摘要： A displacement-electric signal converter is composed of two annular magnetic bodies coaxially disposed, a magnetizing coil provided in an air gap formed between the two annular magnetic bodies, and a detecting coil provided on one of the two magnetic bodies so that the detecting coil is rotatable around the common axis of the two magnetic bodies, said magnetizing coil is energized from an a.c. voltage source, said detecting coil is rotated in accordance with an angular displacement to be measured, whereby an electric signal corresponding to the angular displacement to be measured is obtained from the detecting coil.

摘要翻译： 位移电信号转换器由同轴设置的两个环形磁体组成，设置在两个环形磁体之间的气隙中的磁化线圈和设置在两个磁体中的一个上的检测线圈，使得检测线圈为 可旋转地围绕两个磁体的公共轴线，所述磁化线圈从交流电通电 电压源，所述检测线圈根据要测量的角位移而旋转，由此从检测线圈获得与要测量的角位移相对应的电信号。

公开(公告)号：US09853526B2

公开(公告)日：2017-12-26

申请号：US14753299

申请日：2015-06-29

申请人： CONTINENTAL AUTOMOTIVE FRANCE ,  CONTINENTAL AUTOMOTIVE GmbH

发明人： Xavier Hourne ,  Simon-Didier Venzal

IPC分类号： H02K11/00 ,  G01D5/20 ,  G01D5/22 ,  H02K11/225

CPC分类号： H02K11/225 ,  G01D5/2073 ,  G01D5/225

摘要： An assembly includes at least a first motor (10) and a second motor (20) on which first targets (13) and second targets (23) being respectively mounted, the first targets (13) and the second targets (23) are respectively distributed angularly over the first motor (10) and over the second motor (20), each first target (13) having a first angular aperture, each second target (23) having a second angular aperture, the assembly furthermore having an angular position sensor (5) positioned between the motors (10, 20) and adapted to measure the angular position of the targets (13, 23).

公开(公告)号：US20150362340A1

公开(公告)日：2015-12-17

申请号：US14834561

申请日：2015-08-25

申请人： Carl Zeiss SMT GmbH

发明人： Anton Montagne

IPC分类号： G01D5/22

CPC分类号： G01D5/2275 ,  G01D5/225 ,  G03F7/70141 ,  G03F7/70258 ,  G03F7/7085

摘要： A position sensor for detecting a position of a measurement object, in particular of an optical element of a lithography apparatus is suggested, which includes a transmission coil, a reception coil, which is arranged in such a way that when a transmission signal (Vt, It) is applied to the transmission coil, a reception voltage (Vz, Vx) is generated at the reception coil, and an evaluation device, which links a transmission voltage signal generated in a manner dependent on the transmission signal with a reception voltage signal generated in a manner dependent on the reception voltage and generates a sensor output signal containing information about the relative position of the measurement object with respect to the coils of the position sensor.

摘要翻译： 提出了一种用于检测测量对象的位置的位置传感器，特别是用于光刻设备的光学元件的位置，其包括传输线圈，接收线圈，其以如下方式布置：当发送信号（Vt， 它）被施加到发送线圈，在接收线圈处产生接收电压（Vz​​，Vx），并且将以取决于发送信号的方式生成的发送电压信号与产生的接收电压信号相关联的评估装置 以取决于接收电压的方式，并且生成包含关于测量对象相对于位置传感器的线圈的相对位置的信息的传感器输出信号。