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    SUPPORT APPARATUS FOR AN OPTICAL DEVICE, OPTICAL DEVICE AND LITHOGRAPHY SYSTEM
    2.
    发明申请
    SUPPORT APPARATUS FOR AN OPTICAL DEVICE, OPTICAL DEVICE AND LITHOGRAPHY SYSTEM 有权
    光学设备，光学设备和光刻系统的支持设备

    公开(公告)号：US20160259249A1

    公开(公告)日：2016-09-08

    申请号：US15156602

    申请日：2016-05-17

    申请人： Carl Zeiss SMT GmbH

    发明人： Henner Baitinger ,  Markus Hauf

    IPC分类号： G03F7/20 ,  G02B26/08 ,  G02B7/18

    CPC分类号： G03F7/702 ,  G02B7/181 ,  G02B26/0816 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70141 ,  G03F7/70825 ,  G03F7/70891

    摘要： A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction.

    摘要翻译： 公开了一种用于光学装置的支撑装置。 支撑装置包括第一和第二支撑元件。 支撑装置还包括第一和第二挠曲轴承。 第一挠曲轴承和第二挠曲轴承各自以导热方式将第一支撑元件和第二支撑元件彼此连接，并且以相对于第二支撑元件的至少一个第一方向可移动的方式保持第一支撑元件 。 在第一支撑元件相对于第二支撑元件沿第一方向运动的情况下，由第一挠曲轴承和第二挠曲轴承产生的弹簧力部分或完全抵消。

    CONNECTING COMPONENTS OF AN OPTICAL IMAGING DEVICE
    3.
    发明申请
    CONNECTING COMPONENTS OF AN OPTICAL IMAGING DEVICE 有权

    公开(公告)号：US20230117243A1

    公开(公告)日：2023-04-20

    申请号：US18066845

    申请日：2022-12-15

    申请人： Carl Zeiss SMT GmbH

    发明人： Viktor Schulga ,  Maximilian Schwenk ,  Henner Baitinger

    IPC分类号： G03F7/20

    摘要： An arrangement of a microlithographic imaging device includes a first component, a second component and a connection unit of a connection device. The connection unit is configured to cooperate with the first component in a connection region between the first and second components. The connection unit is configured to cooperate, in a mounted state, with a tensioning unit of the connection device in a tensioning direction. The tensioning unit cooperates with the second component to connect the first and second component to one another in the connection region. The connection unit includes a main body. The insert is inserted in a receiving cutout in the main body and connected to the main body to transfer forces in the tensioning direction. The insert is configured to cooperate with the tensioning unit to connect the first and second components to one another in the connection region.