公开(公告)号：US20170285083A1

公开(公告)日：2017-10-05

申请号：US15471199

申请日：2017-03-28

Applicant: Cascade Microtech, Inc.

Inventor： Timothy Allen McMullen ,  Jeffery Allan Shepler ,  Clint Vander Giessen

IPC: G01R31/00

CPC classification number: G01R31/003 ,  G01R31/2863 ,  G01R31/2874

Abstract: Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.

公开(公告)号：US10060963B2

公开(公告)日：2018-08-28

申请号：US15471199

申请日：2017-03-28

Applicant: Cascade Microtech, Inc.

Inventor： Timothy Allen McMullen ,  Jeffery Allan Shepler ,  Clint Vander Giessen

IPC: G01R31/00

CPC classification number: G01R31/003 ,  G01R31/2863 ,  G01R31/2874

Abstract: Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.