公开(公告)号：US11566177B2

公开(公告)日：2023-01-31

申请号：US16473664

申请日：2018-02-20

申请人： Central Glass Company, Limited

发明人： Hiroyuki Oomori ,  Akifumi Yao ,  Takashi Kashiwaba

IPC分类号： C09K13/00 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/311 ,  H01L29/16

摘要： The present invention aims to provide a dry etching agent having less load on global environment and capable of anisotropic etching without the use of special equipment and obtaining a good processing shape and to provide a dry etching method using the dry etching agent. The dry etching agent according the present invention contains at least a hydrofluoroalkylene oxide represented by the following chemical formula: CF3—CxHyFzO (where x=2 or 3; y=1, 2, 3, 4 or 5; and z=2x−1−y) and having an oxygen-containing three-membered ring. The dry etching method according to the present invention includes selectively etching of at least one kind of silicon-based material selected from the group consisting of silicon dioxide, silicon nitride, polycrystalline silicon, amorphous silicon and silicon carbide with the use of a plasma gas generated by plasmatization of the dry etching agent.

公开(公告)号：US10450291B2

公开(公告)日：2019-10-22

申请号：US15741020

申请日：2016-06-24

申请人： Central Glass Company, Limited

发明人： Takashi Kashiwaba ,  Takako Yamazaki ,  Shoko Ishii ,  Shunsuke Mimura ,  Masanori Fushimi ,  Ryuichi Okamoto ,  Haruki Kobayashi ,  Manabu Yasumoto

IPC分类号： C07D327/10 ,  C07C67/313 ,  C07C67/343 ,  C07C67/52 ,  C07C69/74 ,  C07C67/08 ,  C07C211/27 ,  C07B57/00

摘要： The present invention provides an industrially applicable method for production of a fluorine-containing cyclopropane carboxylic acid compound useful as an intermediate for pharmaceutical and agrichemical products. A fluorine-containing cyclopropane monoester is obtained by: forming a fluorine-containing cyclic sulfate with the use of a fluorine-containing dial compound and sulfuryl fluoride (as a cyclic sulfuric esterification step); reacting the fluorine-containing cyclic sulfate with a malonic diester, thereby forming a fluorine-containing cyclopropane diester (as a cyclopropanation step); and hydrolyzing the fluorine-containing cyclopropane diester (as a hydrolysis step). The fluorine-containing cyclopropane carboxylic acid compound, such as fluorine-containing cyclopropane monoester or its salt, can be obtained with high chemical and optical purity by mixing the fluorine-containing cyclopropane monoester with an amine and subjecting the resulting salt of the fluorine-containing cyclopropane monoester and amine to recrystallization purification.

公开(公告)号：US10793540B2

公开(公告)日：2020-10-06

申请号：US16562214

申请日：2019-09-05

申请人： Central Glass Company, Limited

发明人： Takashi Kashiwaba ,  Takako Yamazaki ,  Shoko Ishii ,  Shunsuke Mimura ,  Masanori Fushimi ,  Ryuichi Okamoto ,  Haruki Kobayashi ,  Manabu Yasumoto

IPC分类号： C07D327/10 ,  C07C67/343 ,  C07C67/52 ,  C07C69/74 ,  C07C67/313 ,  C07C67/08 ,  C07C211/27 ,  C07B57/00

摘要： The present invention provides an industrially applicable method for production of a fluorine-containing cyclopropane carboxylic acid compound useful as an intermediate for pharmaceutical and agrichemical products. A fluorine-containing cyclopropane monoester is obtained by: forming a fluorine-containing cyclic sulfate with the use of a fluorine-containing diol compound and sulfuryl fluoride (as a cyclic sulfuric esterification step); reacting the fluorine-containing cyclic sulfate with a malonic diester, thereby forming a fluorine-containing cyclopropane diester (as a cyclopropanation step); and hydrolyzing the fluorine-containing cyclopropane diester (as a hydrolysis step). The fluorine-containing cyclopropane carboxylic acid compound, such as fluorine-containing cyclopropane monoester or its salt, can be obtained with high chemical and optical purity by mixing the fluorine-containing cyclopropane monoester with an amine and subjecting the resulting salt of the fluorine-containing cyclopropane monoester and amine to recrystallization purification.