公开(公告)号：US11335573B2

公开(公告)日：2022-05-17

申请号：US16461448

申请日：2017-12-20

申请人： Central Glass Company, Limited

发明人： Kunihiro Yamauchi ,  Takashi Masuda ,  Akifumi Yao

IPC分类号： H01L21/67 ,  C23F1/12 ,  C23F4/02 ,  H01L21/302 ,  H01L21/3213

摘要： Disclosed is a dry etching method for etching a metal film on a substrate with an etching gas containing a β-diketone and an additive gas, wherein the metal film contains a metal element capable of forming a complex with the β-diketone; and wherein the amount of water contained in the etching gas is 30 mass ppm or less relative to the amount of the β-diketone. It is preferable that the β-diketone used for the dry etching method is supplied from a β-diketone filled container, wherein the β-diketone filled container has a sealed container body filled with a β-diketone whose water content is 15 mass ppm or less relative to the β-diketone. This etching method enables etching of the metal film while suppressing etching rate variations from the initial stage to the later stage of use of the filled container.

公开(公告)号：US09409843B2

公开(公告)日：2016-08-09

申请号：US14783706

申请日：2014-04-02

申请人： Central Glass Company, Limited

发明人： Takashi Ootsuka ,  Takashi Masuda ,  Akihiro Ishii ,  Mari Imamura ,  Shunsuke Mimura ,  Masato Kimura ,  Hiroshi Minesaki

IPC分类号： C07C45/26 ,  C07C33/00 ,  C07C43/00 ,  C07C49/167 ,  C07C49/227 ,  C07C45/45 ,  C07C33/42 ,  C07C43/178

CPC分类号： C07C45/26 ,  C07C33/426 ,  C07C43/1786 ,  C07C45/45 ,  C07C49/167 ,  C07C49/227

摘要： A production method of a 1,1,1,5,5,5-hexafluoroacetylacetone hydrate according to the present invention includes: step 1: step 1: obtaining a reaction mixture that contains at least 1,1,1,5,5,5-hexafluoro-3-pentyn-2-one or an equivalent thereof by reaction of a 3,3,3-trifluoropropynyl metal with a trifluoroacetate; and step 2: forming the 1,1,1,5,5,5-hexafluoroacetylacetone hydrate by contact of the reaction mixture obtained in the step 1 with water in the presence of an acid. It is possible to produce 1,1,1,5,5,5-hexafluoroacetylacetone by dehydration of the thus-formed hydrate. Thus, the production method according to the present invention is industrially applicable.

摘要翻译： 根据本发明的1,1,1,5,5,5-六氟乙酰丙酮水合物的制备方法包括：步骤1：步骤1：获得含有至少1,1,1,5,5， 通过3,3,3-三氟丙炔基金属与三氟乙酸盐的反应可以得到5-六氟-3-戊炔-2-酮或其等同物; 和步骤2：通过在步骤1中获得的反应混合物与水在酸的存在下接触形成1,1,1,5,5,5-六氟乙酰丙酮水合物。 可以通过如此形成的水合物的脱水制备1,1,1,5,5,5-六氟乙酰丙酮。 因此，本发明的制造方法在工业上是适用的。

公开(公告)号：US10957554B2

公开(公告)日：2021-03-23

申请号：US16461600

申请日：2017-12-20

申请人： Central Glass Company, Limited

发明人： Kunihiro Yamauchi ,  Takashi Masuda ,  Akifumi Yao

IPC分类号： H01L21/311 ,  C23F1/12 ,  H01L21/3213 ,  H01L21/67 ,  H01L21/02

摘要： Disclosed is a dry etching method for etching a metal film on a substrate with the use of an etching gas, wherein the etching gas contains a β-diketone and first and second additive gases; wherein the metal film contains a metal element capable of forming a complex with the β-diketone; wherein the first additive gas is at least one kind of gas selected from the group consisting of NO, NO2, O2 and O3; wherein the second additive gas is at least one kind of gas selected from the group consisting of H2O and H2O2; wherein the amount of the β-diketone contained is 10 vol % to 90 vol % relative to the etching gas; and wherein the amount of the second additive gas contained is 0.1 vol % to 15 vol % relative to the etching gas. The etching rate of the metal film is increased by this etching method.