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公开(公告)号:US11904400B2
公开(公告)日:2024-02-20
申请号:US17733109
申请日:2022-04-29
Inventor: Cong Mao , Weidong Tang , Yuanqiang Luo , Yinghui Ren , Wei Li , Mingjun Zhang , Kun Tang , Gang Wu , Yongle Hu , Feng Shi , Ziyang Chen , Zhuo Wen
CPC classification number: B23H9/02 , B23H3/02 , B23H3/08 , B23H5/04 , B23H2300/10
Abstract: This paper describes an invention involving an electrochemical discharge-enabled micro-grinding process for micro-components of silicon-based materials. The specific machining method is described below. A micro-grinding tool and an auxiliary electrode are respectively connected to the negative and positive electrodes of a pulsed DC power supply. When the current flows through the loop, an electrochemical hydrogen evolution reaction (HER) occurs at the micro-grinding tool in the grinding fluid, which generate multiple hydrogen bubbles. The bubbles coalesce into an insulating gas film and separate the micro-grinding tool from the grinding fluid; when the critical voltage is reached, the gas film is broken down and an electrochemical discharge occurs accompanied by discharge spark; under the action of the discharge spark, the surface material of the workpiece in the discharge-affected region is directly ablated to generate a heat-affected layer (HAL), namely, physical modification.
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公开(公告)号:US11992890B2
公开(公告)日:2024-05-28
申请号:US17733117
申请日:2022-04-29
Inventor: Cong Mao , Ziyang Chen , Yinghui Ren , Wei Li , Yuanqiang Luo , Gang Wu , Mingjun Zhang , Kun Tang , Yongle Hu , Feng Shi , Weidong Tang , Ci Song
Abstract: The invention provides an electrochemical discharge-assisted micro-grinding device for micro-components of brittle and hard materials. The device includes a micro-grinding tool, grinding fluid, a workpiece, an auxiliary electrode, a processing groove, and a pulsed DC power supply; the processing groove is filled with grinding fluid; the micro-grinding tool, the workpiece, and the auxiliary electrode are immersed in the grinding fluid; the micro-grinding tool is composed of a conductive grinding tool base, an electroplating layer, and insulated superabrasives. The micro-grinding tool is connected to the negative electrode of the pulsed DC power supply; the grinding fluid is composed of H2O2, Na2CO3, EDTA-Fe-Na, and deionized water; the workpiece material is brittle and hard; a large number of micro structures need to be produced on the surface of the workpiece.
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