THERMAL MECHANICAL DRIVE ACTUATOR, THERMAL PROBE AND METHOD OF THERMALLY DRIVING A PROBE
    1.
    发明申请
    THERMAL MECHANICAL DRIVE ACTUATOR, THERMAL PROBE AND METHOD OF THERMALLY DRIVING A PROBE 有权
    热机械驱动器,热探头和热驱动探头的方法

    公开(公告)号:US20080011065A1

    公开(公告)日:2008-01-17

    申请号:US11457079

    申请日:2006-07-12

    IPC分类号: G01B5/28

    CPC分类号: G01Q10/045

    摘要: A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

    摘要翻译: 一种用于具有探针的测量仪器的驱动致动器,所述驱动致动器包括与所述探针具有导热关系的加热元件,使得向所述加热元件施加电流以改变所述探针的特性。 探针装置包括探针,其包括具有由具有选定的热膨胀性的材料制成的杆的悬臂,以及与由具有不同于其材料的热膨胀性的热膨胀性的材料制成的悬臂的可操作配合的驱动致动器 制作悬臂。

    Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
    2.
    发明授权
    Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe 有权
    热机械驱动执行器,热探头和热驱动探头的方法

    公开(公告)号:US07748260B2

    公开(公告)日:2010-07-06

    申请号:US11457079

    申请日:2006-07-12

    IPC分类号: G01B5/28 G01Q60/58

    CPC分类号: G01Q10/045

    摘要: A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

    摘要翻译: 一种用于具有探针的测量仪器的驱动致动器,所述驱动致动器包括与所述探针具有导热关系的加热元件,使得向所述加热元件施加电流以改变所述探针的特性。 探针装置包括探针,其包括具有由具有选定的热膨胀性的材料制成的杆的悬臂,以及与由具有不同于其材料的热膨胀性的热膨胀性的材料制成的悬臂的可操作配合的驱动致动器 制作悬臂。

    Method and apparatus of driving torsional resonance mode of a probe-based instrument
    3.
    发明授权
    Method and apparatus of driving torsional resonance mode of a probe-based instrument 有权
    驱动基于探针的仪器的扭转共振模式的方法和装置

    公开(公告)号:US07574903B2

    公开(公告)日:2009-08-18

    申请号:US11669034

    申请日:2007-01-30

    IPC分类号: G01B5/28

    摘要: A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.

    摘要翻译: 操作扫描探针显微镜的方法包括使用具有悬臂的探针,并以其扭转共振频率振动探针。 此外,该方法包括通过设置在探针或探针基座上的双重致动器显着提高扭转驱动效率。 第一和第二致动器可以由相应的第一和第二驱动信号驱动,第一和第二驱动信号相位相差180度。 最大化步骤包括改变第一和第二驱动信号的幅度中的至少一个以最大化扭转振荡。 可以通过调整相应的驱动信号的相位来同时,顺序地或独立地激励悬臂探头的扭转和弯曲振荡。 可以使用一对悬臂部件来通过在远端旋转具有相应末端部分的各个臂来形成纳米制造者。

    Method and apparatus of driving torsional resonance mode of a probe-based instrument
    4.
    发明授权
    Method and apparatus of driving torsional resonance mode of a probe-based instrument 有权
    驱动基于探针的仪器的扭转共振模式的方法和装置

    公开(公告)号:US07168301B2

    公开(公告)日:2007-01-30

    申请号:US10937597

    申请日:2004-09-09

    IPC分类号: G01B5/28

    摘要: A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.

    摘要翻译: 操作扫描探针显微镜的方法包括使用具有悬臂的探针,并以其扭转共振频率振动探针。 此外,该方法包括通过设置在探针或探针基座上的双重致动器显着提高扭转驱动效率。 第一和第二致动器可以由相应的第一和第二驱动信号驱动,第一和第二驱动信号相位相差180度。 最大化步骤包括改变第一和第二驱动信号的幅度中的至少一个以最大化扭转振荡。 可以通过调整相应的驱动信号的相位来同时,顺序地或独立地激励悬臂探头的扭转和弯曲振荡。 可以使用一对悬臂部件来通过在远端旋转具有相应末端部分的各个臂来形成纳米制造者。