-
公开(公告)号：US07595097B2
公开(公告)日：2009-09-29
申请号：US11075343
申请日：2005-03-08
申请人： Charles D. Iacovangelo , Thomas Miebach , Michael W. Mercedes , Steven M. Gasworth , Michael R. Haag
发明人： Charles D. Iacovangelo , Thomas Miebach , Michael W. Mercedes , Steven M. Gasworth , Michael R. Haag
IPC分类号： H05H1/24
CPC分类号： C23C16/513 , B05D1/62
摘要： A system to coat a substrate includes a deposition chamber maintained at sub-atmospheric pressure, one or more arrays containing two or more expanding thermal plasma sources associated with the deposition chamber, and at least one injector containing orifices for each array. The substrate is positioned in the deposition chamber and each expanding thermal plasma source produces a plasma jet with a central axis, while the injector injects vaporized reagents into the plasma to form a coating that is deposited on the substrate. The injector orifices are located within a specified distance from the expanding thermal plasma source to obtain generally a coating with generally uniform coating properties.
摘要翻译： 涂覆基板的系统包括保持在亚大气压下的沉积室，包含与沉积室相关联的两个或更多个膨胀热等离子体源的一个或多个阵列，以及用于每个阵列的至少一个注射器容纳孔。 衬底位于沉积室中，并且每个膨胀的热等离子体源产生具有中心轴的等离子体射流，而喷射器将蒸发的试剂注入等离子体中以形成沉积在衬底上的涂层。 喷射器孔位于距膨胀热等离子体源一定距离内，以获得通常具有大致均匀涂覆性能的涂层。
-
公开(公告)号：US20080160197A1
公开(公告)日：2008-07-03
申请号：US11954766
申请日：2007-12-12
IPC分类号： B05D3/02
CPC分类号： C23C16/513 , C23C16/4404
摘要： A method and apparatus for stabilizing an incidental coating in a substrate coating apparatus is provided. The method includes defining interior surfaces of a coating zone in the substrate coating apparatus. The method may include preheating interior surfaces to a local preheat temperature that is approximately equal to a local coating temperature attained by the surfaces during coating of a substrate, at least partially defining the interior surfaces with a compliant fabric, or at least partially defining the interior surfaces with a compliant fabric and preheating the interior surfaces.
摘要翻译： 提供了一种用于稳定衬底涂覆装置中的附带涂层的方法和装置。 该方法包括限定衬底涂覆设备中的涂层区域的内表面。 该方法可以包括将内表面预热到局部预热温度，其近似等于在涂覆基材期间由表面获得的局部涂层温度，至少部分地用柔顺织物限定内表面，或至少部分地限定内部 表面与柔顺织物并预热内表面。
-
公开(公告)号：US20120009355A1
公开(公告)日：2012-01-12
申请号：US13234682
申请日：2011-09-16
CPC分类号： C23C16/513 , C23C16/4404
摘要： A method and apparatus for stabilizing an incidental coating in a substrate coating apparatus is provided. The method includes defining interior surfaces of a coating zone in the substrate coating apparatus. The method may include preheating interior surfaces to a local preheat temperature that is approximately equal to a local coating temperature attained by the surfaces during coating of a substrate, at least partially defining the interior surfaces with a compliant fabric, or at least partially defining the interior surfaces with a compliant fabric and preheating the interior surfaces.
摘要翻译： 提供了一种用于稳定衬底涂覆装置中的附带涂层的方法和装置。 该方法包括限定衬底涂覆设备中的涂层区域的内表面。 该方法可以包括将内表面预热到局部预热温度，其近似等于在涂覆基材期间由表面获得的局部涂层温度，至少部分地用柔顺织物限定内表面，或至少部分地限定内部 表面与柔顺织物并预热内表面。
-
-
搜索结果
3 条记录 (耗时 0.02 秒)
