公开(公告)号：US20110117283A1

公开(公告)日：2011-05-19

申请号：US12618464

申请日：2009-11-13

申请人： Chia-Hao HSUEH ,  Yuan-Chun CHAO ,  Kuo-Hsing TENG ,  Chao-Chen CHEN

发明人： Chia-Hao HSUEH ,  Yuan-Chun CHAO ,  Kuo-Hsing TENG ,  Chao-Chen CHEN

IPC分类号： B05D1/02 ,  B05C9/08

CPC分类号： H01L21/6715

摘要： A spray coating system is provided. The spray coating system includes a spin support for supporting and spinning the substrate; a sprayer for applying a material to an upper surface of the substrate; a cup surrounding a lateral and lower region of the spin support, wherein an opening is located in an upper central region of the cup; an air supply mechanism for supplying air flows to a back surface of the substrate to prevent the material from adhering thereto, and an exhaust zone disposed below a slanted surface of the cup for exhausting the air flow and material.

摘要翻译： 提供喷涂系统。 喷涂系统包括用于支撑和旋转衬底的自旋支撑件; 用于将材料施加到所述基板的上表面的喷雾器; 围绕所述自旋支撑件的横向和下部区域的杯，其中开口位于所述杯的上中心区域中; 空气供给机构，用于向基板的后表面供给空气，以防止材料粘附到其上;排气区，设置在杯的倾斜表面下方排出气流和材料。