公开(公告)号：US20130032173A1

公开(公告)日：2013-02-07

申请号：US13196086

申请日：2011-08-02

申请人： Yen-Shao PENG ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

发明人： Yen-Shao PENG ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

IPC分类号： B08B9/027 ,  B08B3/04

CPC分类号： H01L21/67017 ,  B08B9/027 ,  H01L21/67051

摘要： A cleaning device is provided, including a top portion, a middle portion, and a bottom portion. The top portion includes a first opening. The middle portion is connected to the top portion, and includes an inlet on a lateral side, an annular channel communicated with the inlet, and a second opening communicated with the first opening. The bottom portion is connected to the middle portion, and includes a reservoir and a third opening. The third opening communicates the second opening and the reservoir.

摘要翻译： 提供一种清洁装置，包括顶部，中间部分和底部。 顶部包括第一开口。 中间部分连接到顶部，并且包括在侧面上的入口，与入口连通的环形通道，以及与第一开口连通的第二开口。 底部连接到中间部分，并且包括储存器和第三开口。 第三开口连通第二开口和储存器。

公开(公告)号：US08944080B2

公开(公告)日：2015-02-03

申请号：US13196086

申请日：2011-08-02

申请人： Yen-Shao Peng ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

发明人： Yen-Shao Peng ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

IPC分类号： B08B9/027 ,  H01L21/67

CPC分类号： H01L21/67017 ,  B08B9/027 ,  H01L21/67051

摘要： A cleaning device is provided, including a top portion, a middle portion, and a bottom portion. The top portion includes a first opening. The middle portion is connected to the top portion, and includes an inlet on a lateral side, an annular channel communicated with the inlet, and a second opening communicated with the first opening. The bottom portion is connected to the middle portion, and includes a reservoir and a third opening. The third opening communicates the second opening and the reservoir.

摘要翻译： 提供一种清洁装置，包括顶部，中间部分和底部。 顶部包括第一开口。 中间部分连接到顶部，并且包括在侧面上的入口，与入口连通的环形通道，以及与第一开口连通的第二开口。 底部连接到中间部分，并且包括储存器和第三开口。 第三开口连通第二开口和储存器。

公开(公告)号：US20110117283A1

公开(公告)日：2011-05-19

申请号：US12618464

申请日：2009-11-13

申请人： Chia-Hao HSUEH ,  Yuan-Chun CHAO ,  Kuo-Hsing TENG ,  Chao-Chen CHEN

发明人： Chia-Hao HSUEH ,  Yuan-Chun CHAO ,  Kuo-Hsing TENG ,  Chao-Chen CHEN

IPC分类号： B05D1/02 ,  B05C9/08

CPC分类号： H01L21/6715

摘要： A spray coating system is provided. The spray coating system includes a spin support for supporting and spinning the substrate; a sprayer for applying a material to an upper surface of the substrate; a cup surrounding a lateral and lower region of the spin support, wherein an opening is located in an upper central region of the cup; an air supply mechanism for supplying air flows to a back surface of the substrate to prevent the material from adhering thereto, and an exhaust zone disposed below a slanted surface of the cup for exhausting the air flow and material.

摘要翻译： 提供喷涂系统。 喷涂系统包括用于支撑和旋转衬底的自旋支撑件; 用于将材料施加到所述基板的上表面的喷雾器; 围绕所述自旋支撑件的横向和下部区域的杯，其中开口位于所述杯的上中心区域中; 空气供给机构，用于向基板的后表面供给空气，以防止材料粘附到其上;排气区，设置在杯的倾斜表面下方排出气流和材料。