Test pad for reducing die sawing damage
    4.
    发明申请
    Test pad for reducing die sawing damage 审中-公开
    用于减少模具锯切损坏的测试垫

    公开(公告)号:US20050230005A1

    公开(公告)日:2005-10-20

    申请号:US11141863

    申请日:2005-06-01

    摘要: A test pad comprises a plurality of metal lines formed in a plurality of metal layers disposed over a wafer or substrate. The plurality of metal lines form a slotted pad member that includes at least one elongated main pad section, at least one side pad section, and a plurality of metal filled vias connecting the lines in the metal layers. The number of vias provided in the central area of the pad may be reduced in number or not provided at all.

    摘要翻译: 测试焊盘包括形成在设置在晶片或衬底上的多个金属层中的多个金属线。 多个金属线形成开槽衬垫构件,该衬垫构件包括至少一个细长的主衬垫部分,至少一个侧衬垫部分和连接金属层中的线的多个金属填充的通孔。 设置在垫的中心区域中的通孔的数量可以减少或完全不提供。