SONOS non-volatile memory cell and fabricating method thereof
    1.
    发明授权
    SONOS non-volatile memory cell and fabricating method thereof 有权
    SONOS非易失性存储单元及其制造方法

    公开(公告)号:US08546226B2

    公开(公告)日:2013-10-01

    申请号:US13189632

    申请日:2011-07-25

    IPC分类号: H01L21/336 H01L29/792

    CPC分类号: H01L21/28282 H01L29/792

    摘要: A method for fabricating a silicon-oxide-nitride-oxide-silicon (SONOS) non-volatile memory cell, wherein the method comprises steps as following: a pad oxide layer and a first hard mask layer are sequentially formed on a substrate. The pad oxide layer and the first hard mask layer are then etched through to form an opening exposing a portion of the substrate. Subsequently, an oxide-nitride-oxide (ONO) structure with a size substantially less than or equal to the opening is formed to coincide with the portion of the substrate exposed from the opening.

    摘要翻译: 一种用于制造氧化硅 - 氧化物 - 氧化物 - 硅(SONOS)非易失性存储单元的方法,其中该方法包括以下步骤:在衬底上依次形成衬垫氧化物层和第一硬掩模层。 然后将衬垫氧化物层和第一硬掩模层蚀刻通过以形成露出衬底的一部分的开口。 随后,形成具有基本上小于或等于该开口的尺寸的氧化物 - 氧化物 - 氧化物(ONO)结构,以与从该开口露出的该基板的一部分重合。

    Method for forming semiconductor structure and method for forming memory using the same
    4.
    发明授权
    Method for forming semiconductor structure and method for forming memory using the same 有权
    用于形成半导体结构的方法和使用其形成存储器的方法

    公开(公告)号:US08383480B1

    公开(公告)日:2013-02-26

    申请号:US13295191

    申请日:2011-11-14

    IPC分类号: H01L21/336

    摘要: A method for forming a semiconductor structure includes following steps. A substrate structure is provided. The substrate structure includes a semiconductor substrate, a first oxide-nitride-oxide (ONO) layer, and a second ONO layer. The semiconductor substrate has first and second surfaces opposite to each other. The first ONO layer includes a first oxide layer, a first nitride layer and a second oxide layer formed on the first surface in sequence. The second ONO layer includes a third oxide layer, a second nitride layer and a fourth oxide layer formed on the second surface in sequence. A nitride mask layer is formed on the first ONO layer. The fourth oxide layer is removed. The second nitride layer and the nitride mask layer are removed. The second oxide layer and the third oxide layer are removed. A fifth oxide layer is formed on the first nitride layer.

    摘要翻译: 一种形成半导体结构的方法包括以下步骤。 提供了基板结构。 衬底结构包括半导体衬底,第一氧化物 - 氧化物 - 氧化物(ONO)层和第二ONO层。 半导体衬底具有彼此相对的第一和第二表面。 第一ONO层包括顺序地形成在第一表面上的第一氧化物层,第一氮化物层和第二氧化物层。 第二ONO层包括依次形成在第二表面上的第三氧化物层,第二氮化物层和第四氧化物层。 在第一ONO层上形成氮化物掩模层。 去除第四氧化物层。 去除第二氮化物层和氮化物掩模层。 去除第二氧化物层和第三氧化物层。 在第一氮化物层上形成第五氧化物层。

    Semiconductor device and method for fabricating semiconductor device
    5.
    发明授权
    Semiconductor device and method for fabricating semiconductor device 有权
    半导体装置及其制造方法

    公开(公告)号:US08629025B2

    公开(公告)日:2014-01-14

    申请号:US13403591

    申请日:2012-02-23

    IPC分类号: H01L29/792 H01L21/336

    摘要: A method for fabricating a semiconductor device is described. A stacked gate dielectric is formed over a substrate, including a first dielectric layer, a second dielectric layer and a third dielectric layer from bottom to top. A conductive layer is formed on the stacked gate dielectric and then patterned to form a gate conductor. The exposed portion of the third and the second dielectric layers are removed with a selective wet cleaning step. S/D extension regions are formed in the substrate with the gate conductor as a mask. A first spacer is formed on the sidewall of the gate conductor and a portion of the first dielectric layer exposed by the first spacer is removed. S/D regions are formed in the substrate at both sides of the first spacer. A metal silicide layer is formed on the S/D regions.

    摘要翻译: 对半导体装置的制造方法进行说明。 堆叠的栅极电介质形成在衬底上,包括从底部到顶部的第一介电层,第二电介质层和第三电介质层。 在堆叠的栅极电介质上形成导电层,然后将其图案化以形成栅极导体。 通过选择性湿式清洗步骤除去第三和第二介电层的暴露部分。 在栅极导体作为掩模的基板中形成S / D延伸区域。 在栅极导体的侧壁上形成第一间隔物,并且去除由第一间隔物露出的第一电介质层的一部分。 在第一间隔物的两侧的基板中形成S / D区域。 在S / D区域上形成金属硅化物层。

    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
    6.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE 有权
    用于制造半导体器件的半导体器件和方法

    公开(公告)号:US20130221424A1

    公开(公告)日:2013-08-29

    申请号:US13403591

    申请日:2012-02-23

    IPC分类号: H01L29/792 H01L21/336

    摘要: A method for fabricating a semiconductor device is described. A stacked gate dielectric is formed over a substrate, including a first dielectric layer, a second dielectric layer and a third dielectric layer from bottom to top. A conductive layer is formed on the stacked gate dielectric and then patterned to form a gate conductor. The exposed portion of the third and the second dielectric layers are removed with a selective wet cleaning step. S/D extension regions are formed in the substrate with the gate conductor as a mask. A first spacer is formed on the sidewall of the gate conductor and a portion of the first dielectric layer exposed by the first spacer is removed. S/D regions are formed in the substrate at both sides of the first spacer. A metal silicide layer is formed on the S/D regions.

    摘要翻译: 对半导体装置的制造方法进行说明。 堆叠的栅极电介质形成在衬底上,包括从底部到顶部的第一介电层,第二电介质层和第三电介质层。 在堆叠的栅极电介质上形成导电层,然后将其图案化以形成栅极导体。 通过选择性湿式清洗步骤除去第三和第二介电层的暴露部分。 在栅极导体作为掩模的基板中形成S / D延伸区域。 在栅极导体的侧壁上形成第一间隔物,并且去除由第一间隔物露出的第一电介质层的一部分。 在第一间隔物的两侧的基板中形成S / D区域。 在S / D区域上形成金属硅化物层。

    INTEGRATED CIRCUIT AND METHOD FOR FABRICATING THE SAME
    7.
    发明申请
    INTEGRATED CIRCUIT AND METHOD FOR FABRICATING THE SAME 审中-公开
    集成电路及其制造方法

    公开(公告)号:US20130234252A1

    公开(公告)日:2013-09-12

    申请号:US13412714

    申请日:2012-03-06

    IPC分类号: H01L27/088 H01L21/336

    摘要: An integrated circuit includes a substrate, a first semiconductor device, a second semiconductor device and an interlayer dielectric layer. At least one isolation structure has been formed in the he substrate so as to separate the substrate into a first active region and a second active region. The first semiconductor device disposed on the first active region of the substrate includes a first gate insulating layer and a poly-silicon gate stacked on the substrate sequentially. The second semiconductor device disposed on the second active region of the substrate includes a second gate insulating layer and a metal gate stacked on the substrate sequentially. The material of the second gate insulating layer is different from that of the first gate insulating layer. The thickness of the metal gate is greater than that of the poly-silicon gate. The interlayer dielectric layer is disposed on the substrate and covering the first semiconductor device.

    摘要翻译: 集成电路包括衬底,第一半导体器件,第二半导体器件和层间电介质层。 在衬底中形成至少一个隔离结构,以将衬底分离成第一有源区和第二有源区。 设置在基板的第一有源区上的第一半导体器件包括依次层叠在基板上的第一栅极绝缘层和多晶硅栅极。 设置在基板的第二有源区上的第二半导体器件包括依次层叠在基板上的第二栅极绝缘层和金属栅极。 第二栅极绝缘层的材料与第一栅极绝缘层的材料不同。 金属栅极的厚度大于多晶硅栅极的厚度。 层间介质层设置在基板上并覆盖第一半导体器件。

    SENSING SYSTEM AND PAIRING METHOD THEREOF

    公开(公告)号:US20220128593A1

    公开(公告)日:2022-04-28

    申请号:US17200919

    申请日:2021-03-15

    申请人: Chih-Ming Wang

    发明人: Chih-Ming Wang

    IPC分类号: G01P15/18 A61B5/11 A61B5/00

    摘要: A sensing system and a pairing method thereof are provided. The pairing method of the sensing system includes: respectively disposing a plurality of sensors on a plurality of parts of a tested subject; setting the tested subjected to perform at least one setting posture, and setting the sensors to respectively provide a plurality of direction information; receiving the direction information respectively provided by the sensors; and identifying the parts where the sensors are respectively arranged according to the direction information. Wherein, when the tested subject performs any one of the at least one setting posture, at least two of the direction information provided by the sensors are different.

    Speaker module and electronic apparatus thereof
    9.
    发明授权
    Speaker module and electronic apparatus thereof 有权
    扬声器模块及其电子设备

    公开(公告)号:US08654968B2

    公开(公告)日:2014-02-18

    申请号:US13361961

    申请日:2012-01-31

    IPC分类号: H04M1/00

    摘要: A speaker module for installing on an electronic device is disclosed. The speaker module includes a containing casing, a speaker device, an antenna, at least one audio signal transmitting member, and at least one antenna signal transmitting member. The containing casing has at least one hole formed thereon. The speaker device is disposed in the containing casing and outputs sound via the hole. The antenna is formed integrally with the containing casing along the contour of the containing casing. The audio signal transmitting member is electrically connected to the speaker device for electrically connecting to the electronic device, so as to establish audio signal transmission between the speaker device and the electronic device. The antenna signal transmitting member is electrically connected to the antenna for electrically connecting to the electronic device, so as to establish antenna signal transmission between the antenna and the electronic device.

    摘要翻译: 公开了一种用于安装在电子设备上的扬声器模块。 扬声器模块包括容纳壳体,扬声器装置,天线,至少一个音频信号发送构件和至少一个天线信号发送构件。 容纳壳体具有形成在其上的至少一个孔。 扬声器装置设置在容纳壳体中并通过孔输出声音。 天线与容纳壳体沿容纳壳体的轮廓一体形成。 音频信号发送构件电连接到扬声器装置,用于电连接到电子装置,以便在扬声器装置和电子装置之间建立音频信号传输。 天线信号发送部件电连接到天线,用于电连接到电子设备,以便在天线和电子设备之间建立天线信号传输。