摘要:
An electric field type time-grating linear displacement sensor based on a single row multilayer structure, including a moving ruler and a fixed ruler. The moving ruler having a row of induced electrodes and the fixed ruler having a row of excitation electrodes.
摘要:
An electric field type time-grating angular displacement sensor, including a rotor and a stator. The rotor includes m rotor electrodes. The rotor electrodes cover a circle on a surface of a rotor body with equal space. The stator includes 4m stator electrodes. The stator electrodes cover a circle on a surface of a stator body with equal space.