公开(公告)号：US20070196040A1

公开(公告)日：2007-08-23

申请号：US11357702

申请日：2006-02-17

申请人： Chun-Ming Wang ,  Ming-Hau Tung ,  Surya Ganti

发明人： Chun-Ming Wang ,  Ming-Hau Tung ,  Surya Ganti

IPC分类号： G02F1/01

CPC分类号： G02B26/001

摘要： Methods and apparatus for providing light in an interferometric modulator device are provided. In one embodiment, a microelectromechanical system (MEMS) is provided that includes a transparent substrate and a plurality of interferometric modulators. The interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective and to provide a path for light from a backlight for lighting the interferometric modulators.

摘要翻译： 提供了用于在干涉式调制器装置中提供光的方法和装置。 在一个实施例中，提供了包括透明基板和多个干涉式调制器的微机电系统（MEMS）。 干涉式调制器包括耦合到透明衬底的光学叠层，光学叠层上的反射层，以及支撑反射层的一个或多个柱，以及为来自背光源的光提供用于点亮干涉式调制器的路径。

公开(公告)号：US20070242341A1

公开(公告)日：2007-10-18

申请号：US11734730

申请日：2007-04-12

申请人： Bangalore Natarajan ,  Surya Ganti

发明人： Bangalore Natarajan ,  Surya Ganti

IPC分类号： G02B26/00

CPC分类号： G02B27/0006 ,  B81B2201/047 ,  B81C1/00285 ,  B81C2203/0145 ,  B81C2203/019 ,  B81C2203/032 ,  G02B26/001 ,  G02B26/0841

摘要： A package structure and method of packaging for a MEMS device is described. A transparent substrate having an interferometric modulator array formed thereon is shown. A single or dual-layered backplate is joined to the transparent substrate with a seal. The interferometric modulator array may be exposed to the surrounding environment through an opening in either the backplate or the seal.

摘要翻译： 描述了用于MEMS器件的封装结构和封装方法。 示出了其上形成有干涉式调制器阵列的透明基板。 单层或双层背板通过密封接合到透明基板上。 干涉式调制器阵列可以通过背板或密封件中的开口暴露于周围环境。

公开(公告)号：US20110194169A1

公开(公告)日：2011-08-11

申请号：US13087184

申请日：2011-04-14

申请人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

发明人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

IPC分类号： G02B26/08

CPC分类号： G02B26/001

摘要： A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

摘要翻译： 透射微机械装置包括衬底，衬底上的光学堆叠和光学堆叠上的可移动膜。 可移动膜可以包括部分反射镜并且被构造成从第一位置移动到第二位置。 当可移动膜处于第一位置时，透射微机械装置被配置为通过预定颜色的光，并且当可移动膜处于第二位置时，微机械装置构造成基本上阻挡入射在基板上的所有光。

公开(公告)号：US20090225395A1

公开(公告)日：2009-09-10

申请号：US12368915

申请日：2009-02-10

申请人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

发明人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

IPC分类号： G02B26/08

CPC分类号： G02B26/001

摘要： A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

摘要翻译： 透射微机械装置包括衬底，衬底上的光学堆叠和光学堆叠上的可移动膜。 可移动膜可以包括部分反射镜并且被构造成从第一位置移动到第二位置。 当可移动膜处于第一位置时，透射微机械装置被配置为通过预定颜色的光，并且当可移动膜处于第二位置时，微机械装置构造成基本上阻挡入射在基板上的所有光。

公开(公告)号：US08174752B2

公开(公告)日：2012-05-08

申请号：US13087184

申请日：2011-04-14

申请人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

发明人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

IPC分类号： G02B26/00

CPC分类号： G02B26/001

摘要： A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

摘要翻译： 透射微机械装置包括衬底，衬底上的光学堆叠和光学堆叠上的可移动膜。 可移动膜可以包括部分反射镜并且被构造成从第一位置移动到第二位置。 当可移动膜处于第一位置时，透射微机械装置被配置为通过预定颜色的光，并且当可移动膜处于第二位置时，微机械装置构造成基本上阻挡入射在基板上的所有光。

公开(公告)号：US07944604B2

公开(公告)日：2011-05-17

申请号：US12368915

申请日：2009-02-10

申请人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

发明人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

IPC分类号： G02B26/00

CPC分类号： G02B26/001

摘要： A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

摘要翻译： 透射微机械装置包括衬底，衬底上的光学堆叠和光学堆叠上的可移动膜。 可移动膜可以包括部分反射镜并且被构造成从第一位置移动到第二位置。 当可移动膜处于第一位置时，透射微机械装置被配置为通过预定颜色的光，并且当可移动膜处于第二位置时，微机械装置构造成基本上阻挡入射在基板上的所有光。

公开(公告)号：US08693084B2

公开(公告)日：2014-04-08

申请号：US13458215

申请日：2012-04-27

申请人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

发明人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

IPC分类号： G02B26/00

CPC分类号： G02B26/001

摘要： A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

摘要翻译： 透射微机械装置包括衬底，衬底上的光学堆叠和光学堆叠上的可移动膜。 可移动膜可以包括部分反射镜并且被构造成从第一位置移动到第二位置。 当可移动膜处于第一位置时，透射微机械装置被配置为通过预定颜色的光，并且当可移动膜处于第二位置时，微机械装置构造成基本上阻挡入射在基板上的所有光。

公开(公告)号：US20120212795A1

公开(公告)日：2012-08-23

申请号：US13458215

申请日：2012-04-27

申请人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

发明人： Surya Ganti ,  Kasra Khazeni ,  Jeff Sampsell

IPC分类号： G02B26/08

CPC分类号： G02B26/001

摘要： A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

摘要翻译： 透射微机械装置包括衬底，衬底上的光学堆叠和光学堆叠上的可移动膜。 可移动膜可以包括部分反射镜并且被构造成从第一位置移动到第二位置。 当可移动膜处于第一位置时，透射微机械装置被配置为通过预定颜色的光，并且当可移动膜处于第二位置时，微机械装置构造成基本上阻挡入射在基板上的所有光。

公开(公告)号：US07746537B2

公开(公告)日：2010-06-29

申请号：US11734730

申请日：2007-04-12

申请人： Bangalore R. Natarajan ,  Surya Ganti

发明人： Bangalore R. Natarajan ,  Surya Ganti

IPC分类号： G02B26/00

CPC分类号： G02B27/0006 ,  B81B2201/047 ,  B81C1/00285 ,  B81C2203/0145 ,  B81C2203/019 ,  B81C2203/032 ,  G02B26/001 ,  G02B26/0841

摘要： A package structure and method of packaging for a MEMS device is described. A transparent substrate having an interferometric modulator array formed thereon is shown. A single or dual-layered backplate is joined to the transparent substrate with a seal. The interferometric modulator array may be exposed to the surrounding environment through an opening in either the backplate or the seal.

摘要翻译： 描述了用于MEMS器件的封装结构和封装方法。 示出了其上形成有干涉式调制器阵列的透明基板。 单层或双层背板通过密封接合到透明基板上。 干涉式调制器阵列可以通过背板或密封件中的开口暴露于周围环境。