公开(公告)号：US20140065553A1

公开(公告)日：2014-03-06

申请号：US13600231

申请日：2012-08-31

申请人： Chung-Sung JANG ,  Ming-Tse LIN ,  Yung-Chang LIN

发明人： Chung-Sung JANG ,  Ming-Tse LIN ,  Yung-Chang LIN

IPC分类号： H01L21/683 ,  G03F7/20 ,  B23Q17/20

CPC分类号： H01L22/20 ,  G03F7/20 ,  G03F7/707 ,  G03F7/70783 ,  H01L21/6836 ,  H01L21/6838 ,  H01L22/12 ,  Y10T29/49764 ,  Y10T279/11

摘要： An apparatus of semiconductor process including a chuck and a vacuum source is provided. The chuck has a plurality of holes for holding a semiconductor substrate, and the vacuum source is used for providing vacuum suction through the holes to make the semiconductor substrate be subjected to varied suction intensities according to a warpage level thereof.

摘要翻译： 提供一种包括卡盘和真空源的半导体工艺装置。 卡盘具有用于保持半导体衬底的多个孔，并且真空源用于通过孔提供真空吸力，以使半导体衬底根据其翘曲程度受到各种抽吸强度。

公开(公告)号：US20110291871A1

公开(公告)日：2011-12-01

申请号：US12910303

申请日：2010-10-22

申请人： Ming-Tse LIN ,  Chung-Chih Hung

发明人： Ming-Tse LIN ,  Chung-Chih Hung

IPC分类号： H03M1/12

CPC分类号： H03M1/52

摘要： A current mode dual-slope temperature-to-digital conversion device is disclosed. The conversion device comprises a temperature dependent current source and a reference current source. Firstly, a capacitor is charged by the temperature dependent current source. Next, the capacitor is discharged by the reference current source. The capacitor is coupled to at least one trigger, and the trigger sends out a first digital signal to a logic controller by the voltage of the capacitor. Then, the logic controller sends out a second digital signal to a time-to-digital converter according to the first digital signal. When the capacitor is discharged by the reference current source and before the first digital signal is varied, the converter receives the second digital signal and a clock signal to generate a corresponding digital output value. The present invention achieves the requirement of the high linearity resolution with the dual-slope architecture lest the curvature effect resulted from the time-domain circuit be occurred.

摘要翻译： 公开了一种电流模式双斜率温度 - 数字转换装置。 转换装置包括与温度相关的电流源和参考电流源。 首先，电容器由依赖于温度的电流源充电。 接下来，电容器被参考电流源放电。 电容器耦合到至少一个触发器，并且触发器通过电容器的电压将第一数字信号发送到逻辑控制器。 然后，逻辑控制器根据第一数字信号向时 - 数转换器发出第二数字信号。 当电容器被参考电流源放电并且在第一数字信号变化之前，转换器接收第二数字信号和时钟信号以产生相应的数字输出值。 本发明通过双斜率结构实现了高线性度分辨率的要求，避免了由时域电路产生的曲率效应。