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公开(公告)号：US20170117825A1
公开(公告)日：2017-04-27
申请号：US15297243
申请日：2016-10-19
发明人： Guillaume JOURDAN , Guillaume LEHEE
CPC分类号： H02N10/00 , B81B3/0024 , B81B2201/031
摘要： A microelectromechanical structure with electrothermal actuation including a fixed part, a moveable part, a first electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part and a second electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part, the beams being mechanically connected to the moveable part enabling a displacement of the moveable part by electrothermal actuation, an electrically conductive connecting element connecting the moveable part to the fixed part, a first connector for connecting the first actuating beam to a first polarisation source and a second connector for connecting the second actuating beam to a second polarisation source, such that the first and the second can be polarised differently and separately.
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2.发明申请公开(公告)号：US20180327253A1
公开(公告)日：2018-11-15
申请号：US15768870
申请日：2016-10-20
发明人： Guillaume JOURDAN , Guillaume LEHEE
CPC分类号： B81B3/0024 , B81B3/0086 , B81B7/02 , B81B2201/0264 , G02B6/3584 , G02B26/0841
摘要： An electrothermally actuated microelectromechanical and/or nanoelectromechanical structure including a stationary portion, at least one portion which is movable relative to the stationary portion, at least one electrothermal actuation beam which makes it possible to cause an electric current to flow from the stationary portion to the movable portion, is mechanically connected to the movable portion and is intended to move the movable portion relative to the stationary portion by electrothermal actuation, and at least one electrically conductive connection element electrically connecting the movable portion to the stationary portion, the actuation beam having a thickness of no greater than half one thickness of the movable portion and no greater than half one thickness of the connection element.
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