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    MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT
    4.
    发明申请
    MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT 有权
    具有双向元件的MEMS器件

    公开(公告)号：US20100182120A1

    公开(公告)日：2010-07-22

    申请号：US12732752

    申请日：2010-03-26

    申请人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    发明人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    IPC分类号： H01H61/01

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

    Singly attached MEMS thermal device and method of manufacture
    5.
    发明授权
    Singly attached MEMS thermal device and method of manufacture 有权
    单独连接的MEMS热设备及其制造方法

    公开(公告)号：US07724121B2

    公开(公告)日：2010-05-25

    申请号：US11516489

    申请日：2006-09-07

    申请人： Paul J. Rubel

    发明人： Paul J. Rubel

    IPC分类号： H01H71/18 ,  H01H61/00 ,  F16K31/02 ,  H02N10/00

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H2061/006 ,  H01H2061/008

    摘要： An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.

    摘要翻译： 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。

    PRODUCTION OF A MATERIAL MULTILAYER MICROCOMPONENTS BY THE SACRIFICIAL THICK LAYER METHOD SACRIFICIELLE
    6.
    发明申请
    PRODUCTION OF A MATERIAL MULTILAYER MICROCOMPONENTS BY THE SACRIFICIAL THICK LAYER METHOD SACRIFICIELLE 失效
    通过深层厚层方法生产材料多层微结构的方法SACRIFICIELLE

    公开(公告)号：US20090197061A1

    公开(公告)日：2009-08-06

    申请号：US12160179

    申请日：2007-01-05

    申请人： Claude Lucat ,  Francis Menil ,  Helene Debeda-Hickel ,  Patrick Ginet

    发明人： Claude Lucat ,  Francis Menil ,  Helene Debeda-Hickel ,  Patrick Ginet

    IPC分类号： B32B3/10 ,  B05D5/12 ,  C25D5/00

    CPC分类号： B81C99/0095 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/0118 ,  H01L41/107 ,  H01L41/27 ,  H01L41/29 ,  H01L41/314 ,  Y10T29/42 ,  Y10T428/24917 ,  Y10T428/24926

    摘要： The invention relates to the preparation of multilayer microcomponents which comprise one or more films, each consisting of a material M selected from metals, metal alloys, glasses, ceramics and glass-ceramics.The method consists in depositing on a substrate one or more films of an ink P, and one or more films of an ink M, each film being deposited in a predefined pattern selected according to the structure of the microcomponent, each film of ink P and each film of ink M being at least partially consolidated before deposition of the next film; effecting a total consolidation of the films of ink M partially consolidated after their deposition, to convert them to films of material M; totally or partially removing the material of each of the films of ink P. An ink P consists of a thermoset resin containing a mineral filler or a mixture comprising a mineral filler and an organic binder. An ink M consists of a mineral material precursor of the material M and an organic binder. The inks are deposited by pouring or by extrusion.

    摘要翻译： 本发明涉及多层微组件的制备，其包括一种或多种膜，每个膜由选自金属，金属合金，玻璃，陶瓷和玻璃陶瓷的材料M组成。 该方法包括在基底上沉积一个或多个油墨P的膜，以及一个或多个油墨M膜，每个膜以按照微组件的结构选择的预定图案沉积，每个油墨P和 油墨M的每个薄膜在沉积下一个薄膜之前被至少部分固结; 在沉积后进行部分固化的墨水M的总体固结，将其转化成材料M的膜; 完全或部分地去除油墨P的每个薄膜的材料。油墨P由含有矿物填料或包含矿物填料和有机粘合剂的混合物的热固性树脂组成。 油墨M由材料M的矿物材料前体和有机粘合剂组成。 油墨通过倾倒或挤压沉积。

    THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH
    7.
    发明申请
    THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH 有权
    用于基于MEMS的继电器开关的热致动器

    公开(公告)号：US20090040008A1

    公开(公告)日：2009-02-12

    申请号：US11836860

    申请日：2007-08-10

    申请人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    IPC分类号： H01H37/52

    CPC分类号： H01H61/02 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H2061/008

    摘要： A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.

    摘要翻译： 本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。 热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有（i）热膨胀层和（ii）与热膨胀层电隔离的电阻加热器。 热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀，从而弯曲“主动”臂并相对于基板移动该臂。 由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制，可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性 与现有技术中获得的相比。

    MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT
    8.
    发明申请
    MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT 有权
    具有双向元件的MEMS器件

    公开(公告)号：US20090002118A1

    公开(公告)日：2009-01-01

    申请号：US11772039

    申请日：2007-06-29

    申请人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    发明人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    IPC分类号： H01H71/18 ,  H01H61/00

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

    Singly attached MEMS thermal device and method of manufacture
    9.
    发明申请
    Singly attached MEMS thermal device and method of manufacture 有权
    单独连接的MEMS热设备及其制造方法

    公开(公告)号：US20080061913A1

    公开(公告)日：2008-03-13

    申请号：US11516489

    申请日：2006-09-07

    申请人： Paul J. Rubel

    发明人： Paul J. Rubel

    IPC分类号： H01F7/08

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H2061/006 ,  H01H2061/008

    摘要： An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.

    摘要翻译： 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。

    NANO-GRIPPER AND METHOD OF PRODUCING SAME
    10.
    发明申请
    NANO-GRIPPER AND METHOD OF PRODUCING SAME 审中-公开
    NANO-GRIPPER及其生产方法

    公开(公告)号：US20080061031A1

    公开(公告)日：2008-03-13

    申请号：US11927976

    申请日：2007-10-30

    申请人： Gen Hashiguchi ,  Yutaka Mihara ,  Takeo Fukino ,  Takafumi Hara ,  Hiroyuki Fujita

    发明人： Gen Hashiguchi ,  Yutaka Mihara ,  Takeo Fukino ,  Takafumi Hara ,  Hiroyuki Fujita

    IPC分类号： B44C1/22 ,  B25J7/00

    CPC分类号： B81C99/002 ,  B25J7/00 ,  B25J9/0015 ,  B25J15/0253 ,  B81B2201/031 ,  F03G7/06 ,  Y10S977/962

    摘要： The nano-gripper of the present invention comprises (i) a pair of arms 71 and 71 disposed side by side, each arm 71 having a face at its front end, the front-end faces of the arms 71 and 71 facing each other, (ii) and a protrusion 72 with a tip formed on the front-end face of each arm, the tips of the protrusions 72 and 72 facing each other, the radius of curvature of each tip being 50 nanometers or less. Each protrusion 72 is a triangular-pyramidal silicon crystal with (001), (100), and (111) side faces.

    摘要翻译： 本发明的纳米夹具包括（i）并排设置的一对臂71和71，每个臂71在其前端具有面，臂71和71的彼此面对的前端面， （ii）和突出部72，其顶端形成在每个臂的前端面上，突出部72和72的前端彼此面对，每个尖端的曲率半径为50纳米或更小。 每个突起72是具有（001），（100）和（111）侧面的三角锥体硅晶体。