公开(公告)号：US6059188A

公开(公告)日：2000-05-09

申请号：US631364

申请日：1996-04-12

申请人： Costanz.o slashed. diFazio ,  Thomas Mazz ,  Chinh Tan ,  Miklos Stern ,  Henry Grossfeld ,  Paul Dvorkis ,  Peter Fazekas ,  Yajun Li ,  Joseph Katz ,  Askold Strat ,  Greg Martino

发明人： Costanz.o slashed. diFazio ,  Thomas Mazz ,  Chinh Tan ,  Miklos Stern ,  Henry Grossfeld ,  Paul Dvorkis ,  Peter Fazekas ,  Yajun Li ,  Joseph Katz ,  Askold Strat ,  Greg Martino

IPC分类号： G06K7/10 ,  H01S5/183 ,  H01S5/42

CPC分类号： G06K7/10742 ,  G06K7/10574 ,  G06K7/10643 ,  G06K7/10653 ,  G06K7/10702 ,  G06K7/10811 ,  H01S5/005 ,  H01S5/02248 ,  H01S5/183 ,  H01S5/423

摘要： An integrated optical module for an optical scanner has a lens spaced from a vertical-cavity surface-emitting laser (VCSEL) by a spacer of defined dimensions. The module, in an alternative embodiment, includes a wafer frame, a suspended mirror mounted for oscillation on the frame, a wafer substrate bonded beneath the frame and a wafer cover bonded above the frame. The cover includes a mirror travel stop to protect the mirror against shocks. A VCSEL mounted to the wafer cover produces a beam which is shaped and deflected by a diffractive optical element onto the oscillating mirror. The reflected beam passes out of the module toward an indicia to be read. Large numbers of such devices may be fabricated relatively cheaply using wafer-scale processing and assembly technology. Three large wafers are fabricated corresponding respectively to arrays of substrates, frames and covers. The large wafers are bonded together in a sandwich arrangement, and are then diced to produce the individual scan modules. The modules may provide either one-dimensional or two-dimensional scanning.

摘要翻译： 用于光学扫描仪的集成光学模块具有通过限定尺寸的间隔件与垂直腔表面发射激光器（VCSEL）间隔开的透镜。 在替代实施例中，该模块包括晶片框架，安装用于在框架上摆动的悬挂镜，结合在框架下方的晶片衬底以及粘结在框架上方的晶片盖。 盖子包括镜子行驶挡板，以防止镜子受到冲击。 安装到晶片盖的VCSEL产生由衍射光学元件成形并偏转到振动反射镜上的光束。 反射光束从模块朝向要读取的标记。 可以使用晶片级处理和组装技术相对便宜地制造大量的这种装置。 制造三个大的晶片，分别对应于基板，框架和盖子的阵列。 大晶片以夹层结构结合在一起，然后被切割以产生各个扫描模块。 模块可提供一维扫描或二维扫描。