公开(公告)号：US07764008B2

公开(公告)日：2010-07-27

申请号：US11709534

申请日：2007-02-22

申请人： Cris Keith Kroneberger ,  Ping Chang

发明人： Cris Keith Kroneberger ,  Ping Chang

IPC分类号： H01J29/46

CPC分类号： H01J37/065 ,  H01J3/027 ,  H01J37/07 ,  H01J2237/06308 ,  H01J2237/3132

摘要： An electron beam gun with an arched shaped beam former as an integral part of a massive cathode block which conducts heat away from the beam former and with a filament mounted to the cathode block for improved alignment.

摘要翻译： 一种具有拱形梁形成器的电子束枪，其作为大量阴极块的整体部分，其将热量从光束形成器传导出去，并将灯丝安装到阴极块，以改善对准。

公开(公告)号：US06287385B1

公开(公告)日：2001-09-11

申请号：US09430724

申请日：1999-10-29

申请人： Cris Keith Kroneberger

发明人： Cris Keith Kroneberger

IPC分类号： B05C1302

CPC分类号： H01L21/68728 ,  C23C14/505 ,  H01L21/68707 ,  H01L21/68771

摘要： An improved restraining clip for holding fragile substrates has been invented. The clip can be used to provide a force on the backside of substrates during processing. The invention has a compound spring mechanism, effectively uncoupling the force used to hold the substrate from that applied by an operator to move the clip. The preferred configuration incorporates a multiple leaf spring for providing force to the substrate, a coil spring to hold the clip in place, and a lever arm for the operator to provide lifting and turning forces on the clip. This combination of features allows the clip to be used on fragile substrates, such as Ga—As, which are easily damaged by other clips.

摘要翻译： 已经发明了用于保持脆弱基板的改进的约束夹。 夹子可用于在加工过程中在基板的背面提供力。 本发明具有复合弹簧机构，有效地将用于保持基板的力与由操作者施加的力分离以移动夹子。 优选的配置包括用于向基板提供力的多片弹簧，用于将夹子保持在适当位置的螺旋弹簧和用于操作者在夹子上提供提升和转动力的杠杆臂。 这种特征的组合允许夹子用于脆弱的基底，例如Ga-As，其容易被其他夹子损坏。