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    Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor
    3.
    发明授权
    Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor 有权
    控制穿孔式电子枪电子束聚焦的方法及其控制装置

    公开(公告)号：US08198797B2

    公开(公告)日：2012-06-12

    申请号：US12446584

    申请日：2007-10-18

    申请人： Eiichi Iijima ,  Guo Hua Shen ,  Tohru Satake

    发明人： Eiichi Iijima ,  Guo Hua Shen ,  Tohru Satake

    IPC分类号： H01J29/46

    CPC分类号： H01J37/07 ,  H01J3/026 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/004 ,  H01J2237/182

    摘要： [Object] In the control of electron beam focusing of a pierce-type electron gun, any influences from the space charge effect and space charge neutralizing action within the electron gun are eliminated to attain complete control of an electron beam.[Solving Means] Feedback control of the pressure within the electron gun is performed by directly measuring temperature at an internal of the pierce-type electron gun. It is desirable that locations where the direct measurement of the temperature at the internal of the electron gun is performed are an anode (39) and a flow register (43). Further, the direct measurement can be performed at any one of a ring, an aperture and an exhaust pipe provided at an outlet or an inlet of any one of a cathode chamber (31), an intermediate chamber, and a scanning chamber (33). Accordingly, all of stabilization of beam producing area (optimized design of electron gun itself), stabilization of beam transporting portion and stabilization of beam using portion have become appropriate.

    摘要翻译： 目的在穿透型电子枪的电子束聚焦的控制中，消除了电子枪内的空间电荷效应和空间电荷中和作用的任何影响，以完全控制电子束。 [解决方法]电子枪内的压力的反馈控制通过直接测量穿孔式电子枪内部的温度来进行。 期望进行电子枪内部的温度的直接测量的位置是阳极（39）和流动寄存器（43）。 此外，直接测量可以在设置在阴极室（31），中间室和扫描室（33）中的任一个的出口或入口处的环，孔和排气管中的任一个处进行， 。 因此，射束产生区域的所有稳定（电子枪本身的优化设计），光束传送部分的稳定和光束使用部分的稳定已经变得合适。

    Electron beam gun
    4.
    发明授权
    Electron beam gun 有权
    电子束枪

    公开(公告)号：US07764008B2

    公开(公告)日：2010-07-27

    申请号：US11709534

    申请日：2007-02-22

    申请人： Cris Keith Kroneberger ,  Ping Chang

    发明人： Cris Keith Kroneberger ,  Ping Chang

    IPC分类号： H01J29/46

    CPC分类号： H01J37/065 ,  H01J3/027 ,  H01J37/07 ,  H01J2237/06308 ,  H01J2237/3132

    摘要： An electron beam gun with an arched shaped beam former as an integral part of a massive cathode block which conducts heat away from the beam former and with a filament mounted to the cathode block for improved alignment.

    摘要翻译： 一种具有拱形梁形成器的电子束枪，其作为大量阴极块的整体部分，其将热量从光束形成器传导出去，并将灯丝安装到阴极块，以改善对准。

    Electron beam gun
    5.
    发明申请
    Electron beam gun 有权
    电子束枪

    公开(公告)号：US20070210691A1

    公开(公告)日：2007-09-13

    申请号：US11709534

    申请日：2007-02-22

    申请人： Cris Kroneberger ,  Ping Chang

    发明人： Cris Kroneberger ,  Ping Chang

    IPC分类号： H01J29/46

    CPC分类号： H01J37/065 ,  H01J3/027 ,  H01J37/07 ,  H01J2237/06308 ,  H01J2237/3132

    摘要： An electron beam gun with an arched shaped beam former as an integral part of a massive cathode block which conducts heat away from the beam former and with a filament mounted to the cathode block for improved alignment.

    摘要翻译： 一种具有拱形梁形成器的电子束枪，其作为大量阴极块的整体部分，其将热量从光束形成器传导出去，并将灯丝安装到阴极块，以改善对准。

    Small electron gun
    6.
    发明申请
    Small electron gun 有权
    小电子枪

    公开(公告)号：US20050052103A1

    公开(公告)日：2005-03-10

    申请号：US10873358

    申请日：2004-06-23

    申请人： Soichi Katagiri ,  Takashi Ohshima

    发明人： Soichi Katagiri ,  Takashi Ohshima

    IPC分类号： H01J37/18 ,  H01J7/16 ,  H01J7/18 ,  H01J37/07 ,  H01J37/073 ,  H01J41/20

    CPC分类号： H01J37/18 ,  H01J7/16 ,  H01J7/18 ,  H01J37/07 ,  H01J2237/022 ,  H01J2237/062 ,  H01J2237/06316 ,  H01J2237/1825 ,  H01J2237/188

    摘要： To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

    摘要翻译： 提供能够保持用于电子显微镜和电子束拉伸装置的高真空压力的小型电子枪。 由非蒸发式吸气泵，加热器，灯丝和电子源定位机构构成的电子枪设置有用于粗排气的开口及其自动打开/关闭阀，以及用于电离和分解惰性气体或 用于非蒸发吸气泵的复合气体。 通过使用电子枪发射电子的高度和宽度约为15cm的小型电子枪，可以保持10 -10乇的高真空压力，而不需要离子泵。

    Method and device for cooling electron beam gun
    8.
    发明授权
    Method and device for cooling electron beam gun 失效
    冷却电子束枪的方法和装置

    公开(公告)号：US4983806A

    公开(公告)日：1991-01-08

    申请号：US487595

    申请日：1990-03-01

    申请人： James L. Harper ,  Charles H. Hill

    发明人： James L. Harper ,  Charles H. Hill

    IPC分类号： C23C14/30 ,  H01J37/07 ,  H01J37/305

    CPC分类号： H01J37/07 ,  C23C14/30 ,  H01J37/305

    摘要： A device and method for cooling the edge of a top plate which partially surrounds an evaporant pocket in an electron beam gun. The invention involves the passage of coolant through a channel in the top plate. The channel is substantially parallel to and close enough to the edge of the top plate so that re-evaporation of evaporant condensed on the edge of the top plate is substantially prevented.

    摘要翻译： 一种用于冷却部分地围绕电子束枪的蒸发袋的顶板的边缘的装置和方法。 本发明涉及冷却剂通过顶板中的通道。 通道与顶板的边缘基本平行并足够接近，从而基本上防止了冷凝在顶板边缘上的蒸发剂的再蒸发。

    Electron gun with linear thermionic cathode for electron-beam heating
    9.
    发明授权
    Electron gun with linear thermionic cathode for electron-beam heating 失效
    具有线性热阴极的电子枪用于电子束加热

    公开(公告)号：US4126811A

    公开(公告)日：1978-11-21

    申请号：US806706

    申请日：1977-06-30

    申请人： Boris A. Movchan ,  Viktor A. Timashov ,  Nikolai V. Chaika

    发明人： Boris A. Movchan ,  Viktor A. Timashov ,  Nikolai V. Chaika

    IPC分类号： H01J37/065 ,  H01J37/07 ,  H01J29/46 ,  H01J29/48

    CPC分类号： H01J37/07 ,  H01J37/065

    摘要： An electron gun comprises a linear thermionic cathode having part of its emitting surface facing an accelerating anode, and the rest of the emitting surface separated by a gap from a cathode-adjacent focusing electrode. The cathode-adjacent focusing electrode is made of two portions spaced apart. On the opposite end surfaces of these portions, there is attached a pair of flat current-conducting springs whose other ends are connected to leads. The other end surfaces of these portions accommodate cathode holders and have a pair of flat springs attached thereto, the other ends of the pair of flat springs being connected to the insulator of the electron gun housing. The pairs of flat springs attached to different portions of the focusing electrode deflect towards each other. The proposed electron gun increases the stability of its electron-optical parameters.

    摘要翻译： 电子枪包括线性热离子阴极，其一部分发射表面面向加速阳极，其余发射表面与阴极相邻的聚焦电极间隔开。 阴极相邻的聚焦电极由间隔开的两个部分制成。 在这些部分的相对端面上，安装有一对扁平的导电弹簧，其另一端连接到引线。 这些部分的另一端面容纳阴极保持器，并具有一对连接到其上的平板弹簧，该对弹簧的另一端连接到电子枪壳体的绝缘体。 连接到聚焦电极的不同部分的一对平板弹簧彼此偏向。 所提出的电子枪增加了其电子 - 光学参数的稳定性。