FIELD CALIBRATION OF THREE-DIMENSIONAL NON-CONTACT SCANNING SYSTEM

    公开(公告)号:US20170264885A1

    公开(公告)日:2017-09-14

    申请号:US15455635

    申请日:2017-03-10

    摘要: A three-dimensional non-contact scanning system is provided. The system includes a stage and at least one scanner configured to scan an object on the stage. A motion control system is configured to generate relative motion between the at least one scanner and the stage. A controller is coupled to the at least one scanner and the motion control system. The controller is configured to perform a field calibration where an artifact having features with known positional relationships is scanned by the at least one scanner in a plurality of different orientations to generate sensed measurement data corresponding to the features. Deviations between the sensed measurement data and the known positional relationships are determined. Based on the determined deviations, a coordinate transform is calculated for each of the at least one scanner where the coordinate transform reduces the determined deviations.