公开(公告)号：US10234769B2

公开(公告)日：2019-03-19

申请号：US15602028

申请日：2017-05-22

Applicant: Cymer, LLC

Inventor： Andrei Dorobantu ,  Joshua Jon Thornes ,  Kevin M. O'Brien ,  Matthew Ryan Graham

IPC: G03B27/42 ,  G03F7/20

Abstract: An optical lithography system is monitored. Information is received from the optical lithography system; a rule is accessed, the rule being associated with one or more of an event in the optical lithography system and an amount of time; a module stored in a library of modules is identified based on the accessed rule; whether a particular condition exists in the optical lithography system is determined using the identified module and the information received from the optical lithography system; and if the particular condition exists, a command signal is generated based on one or more characteristics of the particular condition and provided to an optical source of the optical lithography system. The command signal is based on the determined particular condition, and the command signal is sufficient to change one or more operating parameters of the optical source.

公开(公告)号：US20180335701A1

公开(公告)日：2018-11-22

申请号：US15602028

申请日：2017-05-22

Applicant: Cymer, LLC

Inventor： Andrei Dorobantu ,  Joshua Jon Thornes ,  Kevin M. O'Brien ,  Matthew Ryan Graham

IPC: G03F7/20

CPC classification number: G03F7/7055

Abstract: An optical lithography system is monitored. Information is received from the optical lithography system; a rule is accessed, the rule being associated with one or more of an event in the optical lithography system and an amount of time; a module stored in a library of modules is identified based on the accessed rule; whether a particular condition exists in the optical lithography system is determined using the identified module and the information received from the optical lithography system; and if the particular condition exists, a command signal is generated based on one or more characteristics of the particular condition and provided to an optical source of the optical lithography system. The command signal is based on the determined particular condition, and the command signal is sufficient to change one or more operating parameters of the optical source.