公开(公告)号：US20210358867A1

公开(公告)日：2021-11-18

申请号：US17286712

申请日：2019-10-18

Applicant: DAICEL CORPORATION

Inventor： Naoko TSUJI ,  Akira YAMAKAWA ,  Katsuhiko SUMITA

IPC: H01L23/00 ,  H01L25/065 ,  H01L23/48 ,  H01L21/768 ,  H01L25/00

Abstract: Provided is a method suitable for efficiently manufacturing a semiconductor device while preventing warpage of the wafer laminate in manufacturing a semiconductor device in which semiconductor elements are multilayered through laminating wafers in which the semiconductor elements are fabricated. The method includes at least: preparing a plurality of first wafer laminates each having a laminate configuration including a first and second wafers each having an element forming surface and a back surface opposite from the element forming surface, the laminate configuration wherein the element forming surface sides of the first and second wafers are bonded to each other; thinning the first wafer of the first wafer laminate to form a first wafer laminate having the thinned first wafer; and bonding the thinned first wafer sides of two first wafer laminates having undergone the thinning to each other to form a second wafer laminate.

公开(公告)号：US20160276689A1

公开(公告)日：2016-09-22

申请号：US15033302

申请日：2014-11-04

Applicant: DAICEL CORPORATION ,  DAICEL VALUE COATING LTD.

Inventor： Hiroshi ONOMICHI ,  Katsuhiko SUMITA ,  Yoshimichi OKANO ,  Kanae NISHIMURA ,  Kazuyuki OKADA ,  Takayuki YAEGASHI ,  Ken SUZUKI

IPC: H01M8/1086 ,  C08J5/22 ,  C08F232/08 ,  C08J7/04 ,  B29C33/68 ,  H01M8/1004

CPC classification number: H01M8/1093 ,  B29C33/68 ,  C08F232/08 ,  C08J5/2275 ,  C08J7/042 ,  C08J7/047 ,  C08J2300/12 ,  C08J2367/00 ,  C08J2427/18 ,  C08J2427/22 ,  C08J2445/00 ,  H01M4/881 ,  H01M4/8814 ,  H01M8/1004 ,  H01M8/1069 ,  H01M2008/1095 ,  Y02P70/56

Abstract: A release layer of a release film for producing a membrane electrode assembly of a polymer electrolyte fuel cell comprises a cyclic olefin polymer comprising an olefin unit having a C3-10alkyl group as a side chain thereof. The release layer may have a glass transition temperature of about 210 to 350° C. The release layer may have a transition point of a dynamic storage modulus E′ in a range from −50 to 100° C. An ion exchange layer comprising an ion exchange polymer may be laminated on the release layer of the release film by a roll-to-roll processing to produce a laminate. The release film may be separated from the laminate to give the membrane electrode assembly. The release film achieves improved production of a membrane electrode assembly (an electrolyte membrane and/or an electrode membrane) of a polymer electrolyte fuel cell.

Abstract translation: 用于制造聚合物电解质燃料电池的膜电极组件的脱模膜的剥离层包括环状烯烃聚合物，其包含具有作为其侧链的C 3-10烷基的烯烃单元。 脱模层可以具有约210至350℃的玻璃化转变温度。脱模层可以具有在-50至100℃范围内的动态储能模量E'的转变点。包含离子的离子交换层 交联聚合物可以通过辊对辊加工层压在脱模膜的剥离层上以制备层压体。 剥离膜可以与层压体分离，得到膜电极组件。 剥离膜可以实现固体高分子型燃料电池的膜电极组件（电解质膜和/或电极膜）的制造。