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公开(公告)号:US11793083B2
公开(公告)日:2023-10-17
申请号:US16628765
申请日:2018-07-05
Applicant: DAIKIN INDUSTRIES, LTD. , OSAKA UNIVERSITY
Inventor: Shinya Bitou , Tetsuhiro Kodani , Saori Sakami , Takashi Kanemura , Tsuyoshi Sekitani , Takafumi Uemura , Shusuke Yoshimoto
IPC: H01L41/193 , G01P15/09 , G01H11/08 , H01L41/113 , H10N30/857 , H10N30/30
CPC classification number: H10N30/857 , G01H11/08 , G01P15/0922 , H10N30/302
Abstract: An object of the present invention is to provide a vibration sensor in which the frequency dependence of the output is small. The present invention provides a vibration sensor 1 comprising: a support 2; an organic piezoelectric material 3 deformably disposed in or on the support 2; and an electrode 4 for extracting an electrical signal generated by deformation of the organic piezoelectric material 3, the electrode 4 being formed on the organic piezoelectric material 3, the organic piezoelectric material 3 comprising a copolymer of vinylidene fluoride and one or more monomers copolymerizable with vinylidene fluoride.
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公开(公告)号:US11424402B2
公开(公告)日:2022-08-23
申请号:US16088664
申请日:2017-03-28
Applicant: DAIKIN INDUSTRIES, LTD.
Inventor: Tetsuhiro Kodani , Saori Sakami , Hiroyuki Sagami , Takaya Yamada , Shinya Bitou , Eri Mukai , Takashi Kanemura
IPC: H01L41/08 , B32B27/30 , G06F3/041 , H01L41/113
Abstract: The present invention addresses the problem of providing a bimorph-type piezoelectric film that is less susceptible to the influence of pyroelectric noise resulting from temperature changes, and that makes it possible to provide a pressure-sensitive sensor or the like. The present invention provides a bimorph-type piezoelectric film comprising a first pyroelectric film having piezoelectric anisotropy in an in-plane direction, and a second pyroelectric film having piezoelectric anisotropy in an in-plane direction, the first pyroelectric film and the second pyroelectric film being disposed in such a manner that their surfaces on which electric charges of the same polarity are generated by a temperature increase are each outward-facing.
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