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公开(公告)号:US09715992B2
公开(公告)日:2017-07-25
申请号:US14390095
申请日:2013-04-02
申请人: DELMIC B.V. , Jacob Pieter Hoogenboom , Pieter Kruit , Nalan M. SC Liv , Aernout Christiaan Zonnevylle
CPC分类号: H01J37/222 , G01C21/32 , G01C21/3484 , H01J37/22 , H01J37/226 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/226 , H01J2237/24475 , H01J2237/2806
摘要: An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam.
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公开(公告)号:US20150108350A1
公开(公告)日:2015-04-23
申请号:US14390095
申请日:2013-04-02
申请人: Jacob Pieter HOOGENBOOM , Pieter KRUIT , Nalan LIV , Aernout Christaan ZONNEVYLLE , DELMIC B.V.
CPC分类号: H01J37/222 , G01C21/32 , G01C21/3484 , H01J37/22 , H01J37/226 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/226 , H01J2237/24475 , H01J2237/2806
摘要: An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam.
摘要翻译: 用于检查样品的装置装备有带电粒子柱,用于产生聚焦的带电粒子束以观察或改变样品,以及光学显微镜以观察样品上的感兴趣区域,如通过带电粒子束 或相反亦然。 该装置容纳有适于和配备为表示用柱产生的图像和用显微镜产生的图像的处理单元。 该单元进一步适于执行在一个图像中相互关联感兴趣区域的对准过程,其中对准过程涉及检测由带电粒子束引起的光学图像的变化。
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