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公开(公告)号：US20240058918A1
公开(公告)日：2024-02-22
申请号：US18363955
申请日：2023-08-02
Applicant: DISCO CORPORATION
Inventor： Junsoo WOO , Tomotaka TABUCHI
CPC classification number: B24B7/228 , B24B41/068
Abstract: A chuck table manufacturing method capable of changing over the shape of a holding surface according to at least two workpieces different in area or shape includes a porous plate sticking step of sticking a frame body and a porous plate to each other while the porous plate is accommodated in a recess of the frame body with an upper surface of the porous plate being exposed, a groove forming step of forming, in the porous plate, a groove reaching a bottom surface of the recess, and a resin filling step of filling the groove with a liquid resin and curing the liquid resin.
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