公开(公告)号：US10068811B2

公开(公告)日：2018-09-04

申请号：US15594073

申请日：2017-05-12

申请人： DISCO CORPORATION

发明人： Naoya Sukegawa ,  Ryohei Yokota ,  Naruto Fuwa

IPC分类号： H01L23/544 ,  H01L21/66 ,  H01L21/02

摘要： A gettering property evaluating method for a wafer includes: a gettering layer forming step of polishing a back surface opposite to a front surface of a semiconductor wafer by use of a polishing wheel to form polishing marks on the back surface and to form a gettering layer inside the semiconductor wafer and beneath the polishing marks; an imaging step of imaging at least a unit region of the back surface formed with the polishing marks by imaging means; a counting step of counting the number of the polishing marks having a width of 10 to 500 nm present in the unit region imaged; and a comparing step of comparing the number of the polishing marks counted by the counting step with a predetermined value to determine whether or not the counted number is not less than the predetermined value.

公开(公告)号：US20170338158A1

公开(公告)日：2017-11-23

申请号：US15594073

申请日：2017-05-12

申请人： DISCO CORPORATION

发明人： Naoya Sukegawa ,  Ryohei Yokota ,  Naruto Fuwa

IPC分类号： H01L21/66 ,  H01L21/02 ,  H01L23/544

CPC分类号： H01L22/12 ,  B24B37/00 ,  H01L21/02016 ,  H01L21/02024 ,  H01L21/304 ,  H01L21/3221 ,  H01L22/24 ,  H01L23/544 ,  H01L29/34

摘要： A gettering property evaluating method for a wafer includes: a gettering layer forming step of polishing a back surface opposite to a front surface of a semiconductor wafer by use of a polishing wheel to form polishing marks on the back surface and to form a gettering layer inside the semiconductor wafer and beneath the polishing marks; an imaging step of imaging at least a unit region of the back surface formed with the polishing marks by imaging means; a counting step of counting the number of the polishing marks having a width of 10 to 500 nm present in the unit region imaged; and a comparing step of comparing the number of the polishing marks counted by the counting step with a predetermined value to determine whether or not the counted number is not less than the predetermined value.