EXPOSURE APPARATUS, EXPOSURE METHOD, AND BLIND FOR EXPOSURE APPARATUS
    3.
    发明申请
    EXPOSURE APPARATUS, EXPOSURE METHOD, AND BLIND FOR EXPOSURE APPARATUS 有权
    曝光装置,曝光方法和曝光装置

    公开(公告)号:US20120088196A1

    公开(公告)日:2012-04-12

    申请号:US13071962

    申请日:2011-03-25

    IPC分类号: G03F7/20 G03B27/72

    CPC分类号: G03F7/70066

    摘要: An exposure apparatus includes a mask, a substrate which passes through a region disposed below the mask while moving in a first direction, a light source unit disposed above the mask, where the light source irradiates light on the substrate through the mask, and at least one blind disposed below the light source unit, where the blind blocks the light irradiated from the light source unit, where a second direction is perpendicular to the first direction in a same plane as the first direction, the blind is a polyhedron having a width, a length and a thickness and is disposed such that a direction of the length is substantially parallel to the second direction, and the blind is rotatable around a rotation axis substantially parallel to the second direction, and where the width is greater than the thickness.

    摘要翻译: 曝光装置包括掩模,在第一方向移动时穿过掩模下方的区域的基板,设置在掩模上方的光源单元,其中光源通过掩模将光照射在基板上,并且至少 一个盲设置在所述光源单元下方,其中所述盲区阻挡从所述光源单元照射的光,其中第二方向在与所述第一方向相同的平面中垂直于所述第一方向,所述盲是具有宽度的多面体, 长度和厚度被布置成使得长度方向基本上平行于第二方向,并且盲板可绕基本平行于第二方向的旋转轴线旋转,并且其中宽度大于厚度。