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公开(公告)号：US20090289367A1
公开(公告)日：2009-11-26
申请号：US12472100
申请日：2009-05-26
IPC分类号： H01L23/522 , H01L21/768
CPC分类号： H01L23/53238 , H01L21/3148 , H01L21/318 , H01L21/76832 , H01L23/53295 , H01L29/517 , H01L2924/0002 , H01L2924/00
摘要： A copper interconnection layer is formed in an interconnection trench at a surface of an interlayer insulating film. A diffusion preventing insulating film is formed to cover the copper interconnection layer and is made of at least one of SiC and SiCN. An insulating film is formed on the copper interconnection layer with the diffusion preventing insulating film interposed and is made of SiN.
摘要翻译： 在层间绝缘膜的表面的互连沟槽中形成铜互连层。 形成扩散防止绝缘膜以覆盖铜互连层，并且由SiC和SiCN中的至少一种制成。 在铜互连层上形成有绝缘膜，其中扩散防止绝缘膜插入并由SiN制成。
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公开(公告)号：US20070167010A1
公开(公告)日：2007-07-19
申请号：US11622767
申请日：2007-01-12
IPC分类号： H01L21/44
CPC分类号： H01L21/76843 , H01L21/76805 , H01L21/76844 , H01L21/76877 , H01L21/76886 , H01L23/5226 , H01L23/53238 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： To provide a semiconductor device having a structure in which a barrier metal film containing nitrogen is formed in a connection surface between a copper alloy wiring and a via, in which the electric resistance between the copper alloy wiring and the via can be prevented from rising, and the electric resistance can be prevented from varying. A semiconductor device according to the present invention comprises a first copper alloy wiring, a via and a first barrier metal film. The first copper alloy wiring is formed in an interlayer insulation film and contains a predetermined additive element in a main component Cu. The via is formed in an interlayer insulation film and electrically connected to the upper surface of the first copper alloy wiring. The first barrier metal film is formed so as to be in contact with the first copper alloy wiring in the connection part between the first copper alloy wiring and the via and contains nitrogen. The predetermined additive element reacts with nitrogen to form a high-resistance part. In addition, the concentration of the predetermined additive element is not more than 0.04 wt %.
摘要翻译： 为了提供一种半导体器件，其具有在铜合金布线和通孔之间的连接面上形成含有氮的阻挡金属膜的结构，其中可以防止铜合金布线和通孔之间的电阻上升， 并且可以防止电阻变化。 根据本发明的半导体器件包括第一铜合金布线，通孔和第一阻挡金属膜。 第一铜合金布线形成在层间绝缘膜中，并且在主要成分Cu中含有预定的添加元素。 通孔形成在层间绝缘膜中并与第一铜合金布线的上表面电连接。 第一阻挡金属膜形成为与第一铜合金布线和通孔之间的连接部分中的第一铜合金布线接触并且包含氮。 预定的添加元素与氮反应形成高电阻部分。 此外，预定添加元素的浓度不大于0.04重量％。
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公开(公告)号：US20230361662A1
公开(公告)日：2023-11-09
申请号：US17802227
申请日：2021-02-26
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Yoshihiro KUMANOMIDO , Daisuke KODAMA , Yuta YOSHII , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Yoshihiro KUMANOMIDO , Daisuke KODAMA , Yuta YOSHII , Shigenori INAMOTO
摘要： This vibration actuator comprises a fixed body including a coil, a movable body including a magnet, and an elastic support part that supports the movable body so as to be freely moveable with respect to the fixed body. The elastic support part has an outer circumferential part fixed to the fixed body, an inner circumferential part disposed inside in the radial direction of the outer circumferential part and fixed to the movable body, and a deforming arm part disposed between the outer circumferential part and the inner circumferential part and coupling the outer circumferential part and the inner circumferential part, the deforming arm part being elastically deformable. An attenuation part is provided across the outer circumferential part and a portion of the deforming arm part on an outer circumferential part side thereof, the attenuation part attenuating vibrations in the elastic support part when the movable body moves.
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公开(公告)号：US20190296627A1
公开(公告)日：2019-09-26
申请号：US16288242
申请日：2019-02-28
IPC分类号： H02K33/18
摘要： A vibration actuator includes a movable body provided with one of a coil and a magnet that is disposed radially inward of the coil with a gap formed therebetween, a fixing body provided with the other of the coil and the magnet and a shaft portion, and an elastic support portion, the movable body vibrating in a vibration direction by means of cooperation between the coil supplied with power and the magnet. The movable body is provided with a through-hole into which the shaft portion is inserted with a gap formed between the through-hole and an outer peripheral surface of the shaft portion and the elastic support portion supports the movable body such that the movable body does not come into contact with the shaft portion at a time when the movable body does not vibrate and at a time when the movable body vibrates.
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公开(公告)号：US20220123641A1
公开(公告)日：2022-04-21
申请号：US17561955
申请日：2021-12-26
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
IPC分类号： H02K33/06
摘要： A vibration actuator has a movable body including: a disk-shaped magnet; disk-shaped cores fixed on front and rear surfaces of the magnet and each having an opening at a center thereof; leaf springs having a substantially circular shape; and spring stopper weight parts each having one end positioned by joining the opening to be joined with one of the cores and having another end connected to a central part of one of the leaf springs; and a fixing body including an annular coil having a larger inner diameter than the magnet, the cores and the spring stopper weight parts. The fixing body supports an outer periphery part of the leaf springs and accommodates therein the movable body such that the magnet, the cores and the spring stopper weight parts are capable of moving upwardly and downwardly inside the coil.
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公开(公告)号：US20240213867A1
公开(公告)日：2024-06-27
申请号：US18600854
申请日：2024-03-11
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Yoshihiro KUMANOMIDO , Daisuke KODAMA , Yuta YOSHII , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Yoshihiro KUMANOMIDO , Daisuke KODAMA , Yuta YOSHII , Shigenori INAMOTO
摘要： A vibration actuator includes: a movable body; a pair of elastic support parts each of which includes a flat-plate-shaped leaf spring connected to the movable body and extending radially and is configured to support the movable body; a fixing body configured to connect to the elastic support parts and accommodate therein the movable body such that the movable body is capable of reciprocally vibrating axially; and a cylindrical resin case having an opening portion on a circumferential wall portion and configured to close upper and lower faces of the circumferential wall portion and accommodate therein the fixing body. A lid portion of the case is disposed at a height such that a moving space as a movable range for the movable body is secured and the movable range is limited by contact of the movable body and the lid portion upon extension of the elastic support parts.
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公开(公告)号：US20220123640A1
公开(公告)日：2022-04-21
申请号：US17561954
申请日：2021-12-26
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
IPC分类号： H02K33/06
摘要： A vibration actuator has a movable body and a fixing body. The movable body includes: a disk-shaped magnet; annular cores each having an opening at a center thereof; and spring stopper weight parts, and stacked such that the magnet is disposed at a center of the movable body, the annular cores is fixed on front and rear surfaces of the magnet in its axial direction, and the spring stopper weight parts are joined with the annular cores at the opening. Each spring stopper weight part includes: a spring fixing part connecting to one of the elastic support parts; a joining protrusion part inserted into the opening of one of the annular cores; and a weight body part provided between the spring fixing part and the joining protrusion part, having a larger diameter, and disposed to face and join with an annular surface of one of the annular cores.
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公开(公告)号：US20240305181A1
公开(公告)日：2024-09-12
申请号：US18668287
申请日：2024-05-20
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Yoshihiro KUMANOMIDO , Daisuke KODAMA , Yuta YOSHII , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Yoshihiro KUMANOMIDO , Daisuke KODAMA , Yuta YOSHII , Shigenori INAMOTO
摘要： A vibration actuator comprising: a fixing body having a wound coil; a movable body housed in the fixing body, having a magnet and a yoke, and supported such that it vibrates inside the coil; and a pair of end portion members disposed at end portions of the fixing body and configured not to contact the movable body in a normal vibration range of the movable body but to contact the movable body at a time of impact to regulate a movement range of the movable body; wherein, each of the pair of end portion members includes an interference region that abuts against the movable body at the time of impact and restricts the movement range of the movable body, and a vent hole region that is located on an outer peripheral side of the interference region and includes a plurality of vent holes arranged in a circumferential direction.
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公开(公告)号：US20240275249A1
公开(公告)日：2024-08-15
申请号：US18648526
申请日：2024-04-29
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
IPC分类号： H02K33/06
CPC分类号： H02K33/06
摘要： A vibration actuator includes: a movable body which includes a stack formed by a magnet, a pair of magnetic cores and a pair of non-magnetic weights, is supported at both upper and lower sides of the movable body by a pair of leaf springs made of a magnetic material connected respectively to the pair of non-magnetic weights, and is operable to move vertically inside of a coil of a fixing body. The fixing body further includes a magnetic cylindrical body which is disposed outside of the coil, and has a length, the length being longer than a distance between upper and lower ends of the pair of magnetic cores and shorter than a distance between the pair of leaf springs.
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公开(公告)号：US20220123642A1
公开(公告)日：2022-04-21
申请号：US17561956
申请日：2021-12-26
申请人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
发明人： Yuki TAKAHASHI , Chikara SEKIGUCHI , Shigeyuki SHIMOMURA , Daisuke KODAMA , Yuta YOSHII , Yasutaka KITAMURA , Shigenori INAMOTO
IPC分类号： H02K33/06
摘要： A vibration actuator includes: a movable body including: a disk-shaped magnet; a pair of disk-shaped cores fixed on front and rear surfaces of the disk-shaped magnet and each having an opening at a center thereof; a pair of leaf springs having a substantially circular shape; and a pair of spring stopper weight parts each having one end positioned by joining the opening to be joined with one of the disk-shaped cores and having another end connected to a central part of one of the leaf springs; and a fixing body including an annular coil and configured to support and accommodate therein the movable body such that the disk-shaped magnet, the disk-shaped cores and the spring stopper weight parts are capable of vibrating in an axial direction inside the annular coil.
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