METHOD FOR COOLING MICROWAVE PLASMA AND SYSTEM FOR THE SELECTIVE DESTRUCTION OF CHEMICAL MOLECULES USING SAID METHOD
    1.
    发明申请
    METHOD FOR COOLING MICROWAVE PLASMA AND SYSTEM FOR THE SELECTIVE DESTRUCTION OF CHEMICAL MOLECULES USING SAID METHOD 审中-公开
    用于冷却微波等离子体的方法和使用方法选择性破坏化学分子的系统

    公开(公告)号:US20110073282A1

    公开(公告)日:2011-03-31

    申请号:US12994695

    申请日:2009-04-30

    IPC分类号: F28D15/00

    摘要: The invention relates to a method for cooling a plasma processing system for processing a mixture of particularly gaseous fluids, which comprises a means for coupling a source of microwave power to a mixture of particularly gaseous fluids flowing in a dielectric tube at the level of the coupling means adapted for transferring a portion of the microwave energy to the fluid mixture in order to generate therein a plasma for initiating the breaking of at least some chemical bonds of the fluid molecules, wherein said dielectric tube is at least partially cooled down by a coolant flow in thermal contact with the outer wall of the tube to be cooled. According to the invention, on the one hand, the coolant flow in thermal contact with the dielectric tube flows in a direction opposite to that of the fluid or fluid mixture in the dielectric tube and, on the other hand, the coolant includes at least one oil selected from linear alpha-polyolefins having a carbonated chain of at least ten carbon atoms and/or perfluorocarbonated liquids having a dielectric constant ∈ lower than 2.5, a microwave absorbance tan δ of between 10−2 and 10−4, and a specific heat Cp

    摘要翻译: 本发明涉及一种用于冷却等离子体处理系统以处理特别是气体流体的混合物的方法,该方法包括用于将微波功率源耦合到在耦合的水平面上在介质管中流动的特定气体流体的混合物的装置 适于将一部分微波能量转移到流体混合物的装置,以便在其中产生用于引发流体分子的至少一些化学键断裂的等离子体,其中所述介质管至少部分地被冷却剂流冷却 与要冷却的管的外壁热接触。 根据本发明,一方面,与电介质管热接触的冷却剂流在与电介质管中的流体或流体混合物相反的方向上流动,另一方面,冷却剂包括至少一个 选自具有至少十个碳原子的碳酸化链的直链α-聚烯烃和/或介电常数ε低于2.5的全氟化碳化液体,10-2至10-4的微波吸光度tanδ和比热 Cp <0.6g。 卡/克。 C。