公开(公告)号：US20070098527A1

公开(公告)日：2007-05-03

申请号：US11485145

申请日：2006-07-11

申请人： Daniel Hall ,  Christopher Hofmeister ,  William Fosnight ,  Jeff Araujo ,  Steve Allen ,  Glenn Sindledecker

发明人： Daniel Hall ,  Christopher Hofmeister ,  William Fosnight ,  Jeff Araujo ,  Steve Allen ,  Glenn Sindledecker

IPC分类号： B65H1/00 ,  C23F1/00

CPC分类号： H01L21/67775

摘要： A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

摘要翻译： 基板处理装置具有连接到框架并适于将基板输送容器与框架配合的框架和负载端口。 该装置具有适于可拆卸地连接到框架并且装配在装载口下方的可移动存储器。 存储器可以是容纳基板处理装置的电，机械或机电装置的外壳。

公开(公告)号：US20060045665A1

公开(公告)日：2006-03-02

申请号：US11154787

申请日：2005-06-15

申请人： Daniel Hall ,  Christopher Hofmeister ,  William Fosnight ,  Robert Caveney ,  Ulysses Gilchrist ,  Jeff Araujo

发明人： Daniel Hall ,  Christopher Hofmeister ,  William Fosnight ,  Robert Caveney ,  Ulysses Gilchrist ,  Jeff Araujo

IPC分类号： H01L21/677

CPC分类号： H01L21/67196 ,  Y10S414/135

摘要： A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.

摘要翻译： 一种具有框架，壳体，存取系统和至少基板输送装置或基板处理装置的基板处理装置。 外壳连接到框架。 存取系统连接到框架并形成一个通路，通过该通道使基板移入和移出外壳。 基板输送装置或基板处理装置连接到框架并且至少部分地定位在壳体中。 框架包括可移动部分。 可移动部分可相对于框架移动，使得可移动部分的运动导致进入系统和基板输送装置或基板处理装置中的至少一个与安装位置的分离。 基板输送装置可从许多不同的可互换的基板输送装置中选择。 每个不同的可互换的基板输送装置具有预定的参考基准和用于相对于框架定位基板输送装置的定位特征。 每个基板输送装置的定位特征可相对于其预定参考基准可控地定位成处于可重复的预定位置，在不同的可互换的基板输送装置之间基本上没有变化。