公开(公告)号：US06427202B1

公开(公告)日：2002-07-30

申请号：US09304745

申请日：1999-05-04

申请人： David Alan Richardson ,  Rodney Jay Drake

发明人： David Alan Richardson ,  Rodney Jay Drake

IPC分类号： G06F930

CPC分类号： G06F9/30145 ,  G06F9/30181

摘要： An embeddable microcontroller is provided. The microcontroller has program memory for storing instructions. An instruction decoder feteches instructions, decodes them, and forwards them to an enabler. The enabler checks a status bit or consults a pre-defined lookup table to determine whether the instruction at hand should be executed. If the status bit is set to ENABLE, or the instruction appears on a list of enabled instructions, the decoded instruction is forwarded to the central processing unit for execution. Otherwise, if the status bit is set to DISABLE, or the decoded instruction does not appear on the pre-defined list of enabled instructions, then the instruction is not forwarded to the central processing unit, effectively disabling the instruction.

摘要翻译： 提供了可嵌入式微控制器。 微控制器具有用于存储指令的程序存储器。 指令解码器对指令进行解码，对其进行解码，并将其转发到启动器。 启用程序检查状态位或查阅预定义的查找表，以确定是否应执行指令。 如果状态位设置为ENABLE，或指令出现在使能指令列表上，则将解码的指令转发到中央处理单元执行。 否则，如果状态位设置为DISABLE，或者解码的指令未出现在使能指令的预定义列表上，则指令不会转发到中央处理单元，有效地禁用指令。

公开(公告)号：US06970758B1

公开(公告)日：2005-11-29

申请号：US09905220

申请日：2001-07-12

申请人： Yurong Shi ,  David Alan Richardson ,  Russell Clinton Brown ,  Donald Craig Likes ,  Richard Bruce Patty

发明人： Yurong Shi ,  David Alan Richardson ,  Russell Clinton Brown ,  Donald Craig Likes ,  Richard Bruce Patty

IPC分类号： G05B15/02 ,  G05B19/418 ,  G06F19/00

CPC分类号： G05B19/41875 ,  G05B15/02 ,  G05B2219/32179 ,  G05B2219/32233 ,  G05B2219/45031 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/22

摘要： In its various embodiments, the method collects data from process and metrology tools in a semiconductor manufacturing environment, generates statistics from that data, detects tool failures, processing errors, and other conditions that can jeopardize product output, and performs high level process control in the form of tool shutdowns, lot holds, and lot releases. One method as disclosed automates the collection and recording of data from process and metrology tools, automates configuration of data collection, and automates process equipment shut downs, all within the existing framework of existing MES systems and engineering data collection systems. Automation of configurations and data collection is conducted by creation of data collection plans, data collection capability specifications, and other versioned documents within a process control and data collection system as disclosed herein. These versioned documents may be generated through a common graphical user interface and presented via an Internet web browser or other network interface.

摘要翻译： 在其各种实施例中，该方法在半导体制造环境中从过程和计量工具收集数据，从该数据生成统计数据，检测工具故障，处理错误以及可能危及产品输出的其他条件，并且在 工具关闭，批次和批量发布的形式。 所公开的一种方法可以自动收集和记录来自过程和计量工具的数据，自动化数据收集配置和自动化过程设备关闭，所有这些都在现有MES系统和工程数据收集系统的现有框架内。 通过在本文公开的过程控制和数据收集系统内创建数据收集计划，数据收集能力规范和其他版本化文档来进行配置和数据收集的自动化。 这些版本化的文档可以通过通用图形用户界面生成，并通过互联网浏览器或其他网络接口进行呈现。