公开(公告)号：US06970758B1

公开(公告)日：2005-11-29

申请号：US09905220

申请日：2001-07-12

申请人： Yurong Shi ,  David Alan Richardson ,  Russell Clinton Brown ,  Donald Craig Likes ,  Richard Bruce Patty

发明人： Yurong Shi ,  David Alan Richardson ,  Russell Clinton Brown ,  Donald Craig Likes ,  Richard Bruce Patty

IPC分类号： G05B15/02 ,  G05B19/418 ,  G06F19/00

CPC分类号： G05B19/41875 ,  G05B15/02 ,  G05B2219/32179 ,  G05B2219/32233 ,  G05B2219/45031 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/22

摘要： In its various embodiments, the method collects data from process and metrology tools in a semiconductor manufacturing environment, generates statistics from that data, detects tool failures, processing errors, and other conditions that can jeopardize product output, and performs high level process control in the form of tool shutdowns, lot holds, and lot releases. One method as disclosed automates the collection and recording of data from process and metrology tools, automates configuration of data collection, and automates process equipment shut downs, all within the existing framework of existing MES systems and engineering data collection systems. Automation of configurations and data collection is conducted by creation of data collection plans, data collection capability specifications, and other versioned documents within a process control and data collection system as disclosed herein. These versioned documents may be generated through a common graphical user interface and presented via an Internet web browser or other network interface.

摘要翻译： 在其各种实施例中，该方法在半导体制造环境中从过程和计量工具收集数据，从该数据生成统计数据，检测工具故障，处理错误以及可能危及产品输出的其他条件，并且在 工具关闭，批次和批量发布的形式。 所公开的一种方法可以自动收集和记录来自过程和计量工具的数据，自动化数据收集配置和自动化过程设备关闭，所有这些都在现有MES系统和工程数据收集系统的现有框架内。 通过在本文公开的过程控制和数据收集系统内创建数据收集计划，数据收集能力规范和其他版本化文档来进行配置和数据收集的自动化。 这些版本化的文档可以通过通用图形用户界面生成，并通过互联网浏览器或其他网络接口进行呈现。

公开(公告)号：US06772034B1

公开(公告)日：2004-08-03

申请号：US09905226

申请日：2001-07-12

申请人： Yurong Shi ,  Russell Clinton Brown ,  Donald Craig Likes

发明人： Yurong Shi ,  Russell Clinton Brown ,  Donald Craig Likes

IPC分类号： G06F1718

CPC分类号： G05B19/4188 ,  G05B2219/31395 ,  G05B2219/32191 ,  G05B2219/33149 ,  Y02P90/22 ,  Y02P90/24

摘要： A method is presented wherein an engineering data collection (EDC) subsystem of a process control system as embodied is responsible for configuring data collection, distributing collected data, and storing collected data, and is supported through underlying interfaces in a transaction and performance monitoring system. In an embodiment, an engineering data collection (EDC) broker accepts data from equipment interfaces or a tap subsystem, then distributes the data to all subscribers such as data history, the engineering data analysis (EDA) system interface, and the statistical process control (SPC) subsystem as disclosed herein. Engineering data analysis system interface is responsible for transmitting raw data and process control system data to engineering data analysis system. Data history subscribes to all data and stores it in the transaction and performance monitoring system's online transaction processing (OLTP) database. User input to engineering data collection subsystem is accomplished via web interface or a keyboard data entry client.

摘要翻译： 提出了一种方法，其中实现的过程控制系统的工程数据收集（EDC）子系统负责配置数据收集，分发收集的数据和存储收集的数据，并且通过事务和性能监视系统中的底层接口来支持。 在一个实施例中，工程数据收集（EDC）代理从设备接口或抽头子系统接收数据，然后将数据分配给所有订户，例如数据历史，工程数据分析（EDA）系统接口和统计过程控制 SPC）子系统。 工程数据分析系统界面负责将原始数据和过程控制系统数据传输到工程数据分析系统。 数据历史预订所有数据并将其存储在事务和性能监视系统的在线事务处理（OLTP）数据库中。 工程数据采集子系统的用户输入通过Web界面或键盘数据输入客户端完成。

公开(公告)号：US06839713B1

公开(公告)日：2005-01-04

申请号：US09905213

申请日：2001-07-12

申请人： Yurong Shi ,  Richard Bruce Patty ,  Russell Clinton Brown

发明人： Yurong Shi ,  Richard Bruce Patty ,  Russell Clinton Brown

IPC分类号： G06Q10/06 ,  G06F17/30

CPC分类号： G06Q10/06 ,  G11C2029/0403 ,  Y10S707/99933 ,  Y10S707/99942 ,  Y10S707/99945

摘要： The functionality of various process control and data collection system embodiments may be improved by employing the database methodology disclosed herein during the requirements-analysis phase for data collection and process control in a semiconductor manufacturing environment. The relational database storage technology as disclosed herein consists of a set of interconnected tables, where each table has a field or an amalgamation of fields (primary key) that uniquely identifies each record (tuple) in the table. In addition, the method as disclosed herein utilizes foreign keys, which represent the value of a primary key for a related table. Aggregation levels are also employed in the method as disclosed herein to associate data from various production

摘要翻译： 可以通过在半导体制造环境中的数据收集和过程控制的需求分析阶段期间使用本文公开的数据库方法来改进各种过程控制和数据收集系统实施例的功能。 如本文所公开的关系数据库存储技术由一组互连的表组成，其中每个表具有唯一地标识表中每个记录（元组）的字段（主键）的字段或合并。 此外，本文公开的方法利用表示相关表的主键的值的外键。 在本文公开的方法中也采用汇总水平来关联来自各种生产的数据

公开(公告)号：US06727106B1

公开(公告)日：2004-04-27

申请号：US09905222

申请日：2001-07-12

申请人： Emmanuel Kwaku Foli Ankutse ,  Russell Clinton Brown ,  Konstantinos Kyriakopoulos ,  Yurong Shi

发明人： Emmanuel Kwaku Foli Ankutse ,  Russell Clinton Brown ,  Konstantinos Kyriakopoulos ,  Yurong Shi

IPC分类号： H01L2100

CPC分类号： G05B19/41875 ,  G05B2219/31372 ,  G05B2219/32191 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/12 ,  Y02P90/22

摘要： The statistical process control (SPC) subsystem is the heart of the data collection and process control system for semiconductor manufacturing in the various embodiments as disclosed herein. SPC is responsible for performing calculations to generate statistics on collected measurement data, applying rules to the statistics, and executing error actions when those rules are violated. SPC subsystem plays a role in corrective actions as well by lifting restrictions previously imposed on tools or lots as a result of rule violations. In an embodiment, SPC is supported through underlying transaction and performance monitoring system components. In an embodiment, SPC procedure is a statistical engine that performs what the process control strategy (PCS) describes, hence there is at least one SPC procedure for each PCS. Components in SPC send data to the chart client subsystem as embodied herein, which allows visualization of statistics generated by SPC procedure in graphical chart form via a web browser. SPC communicates with MES via an interface.

摘要翻译： 统计过程控制（SPC）子系统是本文公开的各种实施例中用于半导体制造的数据收集和过程控制系统的核心。 SPC负责执行计算以生成收集的测量数据的统计信息，对统计信息应用规则，并在违反规则时执行错误操作。 SPC子系统在纠正措施中发挥作用，同时取消先前因违反规则而对工具或批次施加的限制。 在一个实施例中，通过底层事务和性能监视系统组件支持SPC。 在一个实施例中，SPC过程是执行过程控制策略（PCS）描述的统计引擎，因此每个PCS至少有一个SPC过程。 SPC中的组件将数据发送到如本文所体现的图表客户端子系统，这允许通过Web浏览器以图形图表形式通过SPC过程生成的统计信息的可视化。 SPC通过接口与MES进行通信。

公开(公告)号：US20140195549A1

公开(公告)日：2014-07-10

申请号：US13772870

申请日：2013-02-21

申请人： Junghoon Ahn ,  Abhishek Gupta ,  Christian Posse ,  Anmol Bhasin ,  Yurong Shi ,  Jian Li ,  Jacob Kessler

发明人： Junghoon Ahn ,  Abhishek Gupta ,  Christian Posse ,  Anmol Bhasin ,  Yurong Shi ,  Jian Li ,  Jacob Kessler

IPC分类号： G06F17/30

CPC分类号： G06F17/30867 ,  G06F17/30861 ,  G06F17/30991 ,  H04L51/32 ,  H04L67/22 ,  H04L67/306

摘要： Disclosed in some examples are methods, systems and machine readable medium for recommending an out-of-network communication by determining a set of potential recommended members of a social networking service based upon one or more recommendation criteria. In some examples the recommendation criteria may include: a profile similarity to a previous target of an out-of-network communication, a degree of correspondence between an interest and intent of the sending member, and a likelihood of response.

摘要翻译： 在一些示例中公开了用于通过基于一个或多个推荐标准确定社交网络服务的一组潜在推荐成员来推荐网络外通信的方法，系统和机器可读介质。 在一些示例中，推荐标准可以包括：与网络外通信的先前目标的简档相似性，发送成员的兴趣和意图之间的对应程度以及响应的可能性。

公开(公告)号：US07051336B1

公开(公告)日：2006-05-23

申请号：US10085951

申请日：2002-02-28

申请人： Russell C. Brown ,  Donald C. Likes ,  David A. Richardson ,  Yurong Shi ,  Jeffrey B. Toth

发明人： Russell C. Brown ,  Donald C. Likes ,  David A. Richardson ,  Yurong Shi ,  Jeffrey B. Toth

IPC分类号： G06F3/00 ,  G06F9/44 ,  G06F19/00

CPC分类号： G06F8/70 ,  G06F8/24 ,  G06F9/4492 ,  G06Q10/10

摘要： A process, architecture, and computer program product for using the inheritance features of an object-oriented system to enable multiple programmers to modify different behaviors of an object concurrently. A first method and a second method to be performed on the object are identified. The first method is developed in a first application having a first subclass of the object's class. A first application-specific object is an instantiation of the first subclass. The second method is concurrently developed in a second application having a second subclass of the object's class. A second application-specific object is an instantiation of the second subclass. Invoking the first method performs the first method on the first application-specific object, such that the object communicates as if the first method were performed on the object. Modifying the first method does not affect the second method, and vice versa.

摘要翻译： 一种用于使用面向对象系统的继承特征的过程，架构和计算机程序产品，以使多个程序员能够同时修改对象的不同行为。 识别要对对象执行的第一种方法和第二种方法。 第一种方法是在具有对象类的第一个子类的第一个应用程序中开发的。 第一个应用程序特定的对象是第一个子类的实例化。 第二种方法在具有对象类的第二子类的第二应用中同时开发。 第二个应用程序特定的对象是第二个子类的实例化。 调用第一种方法在第一个特定于应用程序的对象上执行第一种方法，使得该对象在对象上进行第一种方法的通信。 修改第一种方法不影响第二种方法，反之亦然。

公开(公告)号：US06826437B2

公开(公告)日：2004-11-30

申请号：US10085956

申请日：2002-02-28

申请人： Barry R. Hobbs ,  Yurong Shi ,  Russell C. Brown

发明人： Barry R. Hobbs ,  Yurong Shi ,  Russell C. Brown

IPC分类号： G06F1900

CPC分类号： G06Q10/06 ,  G05B19/41835 ,  G05B2219/32043 ,  Y02P90/12 ,  Y10S707/99945 ,  Y10S707/99948

摘要： A method, system and computer program product to isolate information related to performing a manufacturing process, called a configuration document, from the context in which the information is used. A context/configuration association can be independently established between a process context and a context-free configuration document including instructions for performing a manufacturing process. Because the context/configuration association is independent of both the process context and the context-free configuration document, the context/configuration association can be independently reviewed and approved without affecting other process contexts or configuration documents.

摘要翻译： 一种方法，系统和计算机程序产品，用于从使用信息的上下文中隔离与执行制造过程相关的信息，称为配置文档。 可以在流程上下文和包括用于执行制造过程的指令的无上下文配置文档之间独立地建立上下文/配置关联。 由于上下文/配置关联独立于进程上下文和无上下文配置文档，所以可以独立地审查和批准上下文/配置关联，而不会影响其他进程上下文或配置文档。

公开(公告)号：US07047517B1

公开(公告)日：2006-05-16

申请号：US09898876

申请日：2001-07-03

申请人： Russell C. Brown ,  Donald C. Likes ,  David A. Richardson ,  William A. Norris ,  Yurong Shi ,  Jeffrey B. Toth ,  Barry R. Hobbs

发明人： Russell C. Brown ,  Donald C. Likes ,  David A. Richardson ,  William A. Norris ,  Yurong Shi ,  Jeffrey B. Toth ,  Barry R. Hobbs

IPC分类号： G06F9/44

CPC分类号： G06F9/465

摘要： An architecture for integrating data between a plurality of software applications in a factory environment comprises a factory system and a domain application. The factory system comprises a domain object superclass and at least two first-level subclasses of the domain object superclass. An instantiation of one of the first-level subclasses corresponds to a domain object, which represents an item in a factory. The factory system also includes a service, which provides an operation related to the domain object. The service comprises at least one component, where each component is operable to perform the operation related to the domain object. The architecture also includes a domain application, which implements a component of the service of the factory system to perform the operation related to the domain object. The architecture can optionally include a system manager for managing hardware and software in the factory.

摘要翻译： 用于在工厂环境中的多个软件应用之间集成数据的架构包括工厂系统和域应用。 工厂系统包括域对象超类和域对象超类的至少两个第一级子类。 第一级子类之一的实例化对应于一个域对象，它表示工厂中的一个项目。 工厂系统还包括一个服务，它提供与域对象相关的操作。 该服务包括至少一个组件，其中每个组件可操作以执行与域对象相关的操作。 架构还包括一个域应用程序，它实现了工厂系统服务的组件，以执行与域对象相关的操作。 该架构可以可选地包括用于在工厂中管理硬件和软件的系统管理器。