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    System and software for data collection and process control in semiconductor manufacturing and method thereof
    1.
    发明授权
    System and software for data collection and process control in semiconductor manufacturing and method thereof 失效
    用于半导体制造中的数据收集和过程控制的系统和软件及其方法

    公开(公告)号：US06970758B1

    公开(公告)日：2005-11-29

    申请号：US09905220

    申请日：2001-07-12

    申请人： Yurong Shi ,  David Alan Richardson ,  Russell Clinton Brown ,  Donald Craig Likes ,  Richard Bruce Patty

    发明人： Yurong Shi ,  David Alan Richardson ,  Russell Clinton Brown ,  Donald Craig Likes ,  Richard Bruce Patty

    IPC分类号： G05B15/02 ,  G05B19/418 ,  G06F19/00

    CPC分类号： G05B19/41875 ,  G05B15/02 ,  G05B2219/32179 ,  G05B2219/32233 ,  G05B2219/45031 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/22

    摘要： In its various embodiments, the method collects data from process and metrology tools in a semiconductor manufacturing environment, generates statistics from that data, detects tool failures, processing errors, and other conditions that can jeopardize product output, and performs high level process control in the form of tool shutdowns, lot holds, and lot releases. One method as disclosed automates the collection and recording of data from process and metrology tools, automates configuration of data collection, and automates process equipment shut downs, all within the existing framework of existing MES systems and engineering data collection systems. Automation of configurations and data collection is conducted by creation of data collection plans, data collection capability specifications, and other versioned documents within a process control and data collection system as disclosed herein. These versioned documents may be generated through a common graphical user interface and presented via an Internet web browser or other network interface.

    摘要翻译： 在其各种实施例中，该方法在半导体制造环境中从过程和计量工具收集数据，从该数据生成统计数据，检测工具故障，处理错误以及可能危及产品输出的其他条件，并且在 工具关闭，批次和批量发布的形式。 所公开的一种方法可以自动收集和记录来自过程和计量工具的数据，自动化数据收集配置和自动化过程设备关闭，所有这些都在现有MES系统和工程数据收集系统的现有框架内。 通过在本文公开的过程控制和数据收集系统内创建数据收集计划，数据收集能力规范和其他版本化文档来进行配置和数据收集的自动化。 这些版本化的文档可以通过通用图形用户界面生成，并通过互联网浏览器或其他网络接口进行呈现。

    System and software for data distribution in semiconductor manufacturing and method thereof
    2.
    发明授权
    System and software for data distribution in semiconductor manufacturing and method thereof 有权
    用于半导体制造中的数据分配的系统和软件及其方法

    公开(公告)号：US06772034B1

    公开(公告)日：2004-08-03

    申请号：US09905226

    申请日：2001-07-12

    申请人： Yurong Shi ,  Russell Clinton Brown ,  Donald Craig Likes

    发明人： Yurong Shi ,  Russell Clinton Brown ,  Donald Craig Likes

    IPC分类号： G06F1718

    CPC分类号： G05B19/4188 ,  G05B2219/31395 ,  G05B2219/32191 ,  G05B2219/33149 ,  Y02P90/22 ,  Y02P90/24

    摘要： A method is presented wherein an engineering data collection (EDC) subsystem of a process control system as embodied is responsible for configuring data collection, distributing collected data, and storing collected data, and is supported through underlying interfaces in a transaction and performance monitoring system. In an embodiment, an engineering data collection (EDC) broker accepts data from equipment interfaces or a tap subsystem, then distributes the data to all subscribers such as data history, the engineering data analysis (EDA) system interface, and the statistical process control (SPC) subsystem as disclosed herein. Engineering data analysis system interface is responsible for transmitting raw data and process control system data to engineering data analysis system. Data history subscribes to all data and stores it in the transaction and performance monitoring system's online transaction processing (OLTP) database. User input to engineering data collection subsystem is accomplished via web interface or a keyboard data entry client.

    摘要翻译： 提出了一种方法，其中实现的过程控制系统的工程数据收集（EDC）子系统负责配置数据收集，分发收集的数据和存储收集的数据，并且通过事务和性能监视系统中的底层接口来支持。 在一个实施例中，工程数据收集（EDC）代理从设备接口或抽头子系统接收数据，然后将数据分配给所有订户，例如数据历史，工程数据分析（EDA）系统接口和统计过程控制 SPC）子系统。 工程数据分析系统界面负责将原始数据和过程控制系统数据传输到工程数据分析系统。 数据历史预订所有数据并将其存储在事务和性能监视系统的在线事务处理（OLTP）数据库中。 工程数据采集子系统的用户输入通过Web界面或键盘数据输入客户端完成。

    System and software for database structure in semiconductor manufacturing and method thereof
    3.
    发明授权
    System and software for database structure in semiconductor manufacturing and method thereof 失效
    半导体制造中数据库结构的系统和软件及其方法

    公开(公告)号：US06839713B1

    公开(公告)日：2005-01-04

    申请号：US09905213

    申请日：2001-07-12

    申请人： Yurong Shi ,  Richard Bruce Patty ,  Russell Clinton Brown

    发明人： Yurong Shi ,  Richard Bruce Patty ,  Russell Clinton Brown

    IPC分类号： G06Q10/06 ,  G06F17/30

    CPC分类号： G06Q10/06 ,  G11C2029/0403 ,  Y10S707/99933 ,  Y10S707/99942 ,  Y10S707/99945

    摘要： The functionality of various process control and data collection system embodiments may be improved by employing the database methodology disclosed herein during the requirements-analysis phase for data collection and process control in a semiconductor manufacturing environment. The relational database storage technology as disclosed herein consists of a set of interconnected tables, where each table has a field or an amalgamation of fields (primary key) that uniquely identifies each record (tuple) in the table. In addition, the method as disclosed herein utilizes foreign keys, which represent the value of a primary key for a related table. Aggregation levels are also employed in the method as disclosed herein to associate data from various production

    摘要翻译： 可以通过在半导体制造环境中的数据收集和过程控制的需求分析阶段期间使用本文公开的数据库方法来改进各种过程控制和数据收集系统实施例的功能。 如本文所公开的关系数据库存储技术由一组互连的表组成，其中每个表具有唯一地标识表中每个记录（元组）的字段（主键）的字段或合并。 此外，本文公开的方法利用表示相关表的主键的值的外键。 在本文公开的方法中也采用汇总水平来关联来自各种生产的数据

    System and software for statistical process control in semiconductor manufacturing and method thereof
    4.
    发明授权
    System and software for statistical process control in semiconductor manufacturing and method thereof 有权
    用于半导体制造中的统计过程控制的系统和软件及其方法

    公开(公告)号：US06727106B1

    公开(公告)日：2004-04-27

    申请号：US09905222

    申请日：2001-07-12

    申请人： Emmanuel Kwaku Foli Ankutse ,  Russell Clinton Brown ,  Konstantinos Kyriakopoulos ,  Yurong Shi

    发明人： Emmanuel Kwaku Foli Ankutse ,  Russell Clinton Brown ,  Konstantinos Kyriakopoulos ,  Yurong Shi

    IPC分类号： H01L2100

    CPC分类号： G05B19/41875 ,  G05B2219/31372 ,  G05B2219/32191 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/12 ,  Y02P90/22

    摘要： The statistical process control (SPC) subsystem is the heart of the data collection and process control system for semiconductor manufacturing in the various embodiments as disclosed herein. SPC is responsible for performing calculations to generate statistics on collected measurement data, applying rules to the statistics, and executing error actions when those rules are violated. SPC subsystem plays a role in corrective actions as well by lifting restrictions previously imposed on tools or lots as a result of rule violations. In an embodiment, SPC is supported through underlying transaction and performance monitoring system components. In an embodiment, SPC procedure is a statistical engine that performs what the process control strategy (PCS) describes, hence there is at least one SPC procedure for each PCS. Components in SPC send data to the chart client subsystem as embodied herein, which allows visualization of statistics generated by SPC procedure in graphical chart form via a web browser. SPC communicates with MES via an interface.

    摘要翻译： 统计过程控制（SPC）子系统是本文公开的各种实施例中用于半导体制造的数据收集和过程控制系统的核心。 SPC负责执行计算以生成收集的测量数据的统计信息，对统计信息应用规则，并在违反规则时执行错误操作。 SPC子系统在纠正措施中发挥作用，同时取消先前因违反规则而对工具或批次施加的限制。 在一个实施例中，通过底层事务和性能监视系统组件支持SPC。 在一个实施例中，SPC过程是执行过程控制策略（PCS）描述的统计引擎，因此每个PCS至少有一个SPC过程。 SPC中的组件将数据发送到如本文所体现的图表客户端子系统，这允许通过Web浏览器以图形图表形式通过SPC过程生成的统计信息的可视化。 SPC通过接口与MES进行通信。