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公开(公告)号：US5808797A
公开(公告)日：1998-09-15
申请号：US638605
申请日：1996-04-26
CPC分类号： B81B3/001 , G02B26/0808 , G02B5/1828 , B81C2201/115
摘要： A modulator for modulating incident rays of light, the modulator having a plurality of equally spaced apart elements, each of which includes a light reflective planar surface. The elements are arranged parallel to each other with their light reflective surfaces parallel to each other. The modulator includes means for supporting elements in relation to one another and means for moving particular ones of the elements relative to others so that the moved elements transit between a first configuration wherein the modulator acts to reflect the incident rays of light as a plane mirror, and a second configuration wherein the modulator diffracts the light reflected therefrom. In operation, the light reflective surfaces of the elements remain parallel to each other in both the first and the second configurations. The perpendicular spacing between the reflective surfaces of respective elements is equal to m/4 times the wavelength of the incident rays of light, wherein m=an even whole number or zero when the elements are in the first configuration and m=an odd whole number when the elements are in the second configuration.
摘要翻译： 一种用于调制入射光线的调制器，该调制器具有多个等间隔开的元件，每个元件包括光反射平面。 元件彼此平行地布置，其光反射表面彼此平行。 调制器包括用于相对于彼此支撑元件的装置和用于相对于其它元件移动元件中的特定元件的装置，使得移动的元件在第一配置之间转换，其中调制器作用以将入射的光线反射为平面镜， 以及其中调制器衍射从其反射的光的第二配置。 在操作中，元件的光反射表面在第一和第二构造中保持彼此平行。 各个元件的反射表面之间的垂直间距等于入射光线的波长的m / 4倍，其中当元件处于第一配置时m =偶数或零，m =奇数整数 当元件处于第二配置时。
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2.发明授权Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 失效用于调制光束的可变形光栅装置，并且包括用于消除光栅元件和下面基板之间的静摩擦的装置
公开(公告)号：US5459610A
公开(公告)日：1995-10-17
申请号：US62688
申请日：1993-05-20
CPC分类号： B81B3/001 , G02B26/0808 , G02B5/1828 , B81C2201/115 , Y10S359/90
摘要： A modulator for modulating incident rays of light, the modulator comprising a plurality of equally spaced apart beam elements, each of which includes a light reflective planar surface. The elements are arranged parallel to each other with their light reflective surfaces parallel to each other. The modulator includes means for supporting the beam elements in relation to one another and means for moving the beam elements relative to one another so that the beams move between a first configuration wherein the modulator acts to reflect the incident rays of light as a plane mirror, and a second configuration wherein the modulator diffracts the incident rays of light as they are reflected therefrom. At least one of the facing surfaces of the beam elements and underlying substrate is configured to reduce any tendency to stick as they are pulled together. In operation, the light reflective surfaces of the beam elements remain parallel to each other in both the first and the second configurations and the perpendicular spacing between the reflective surfaces of adjacent beam elements is equal to m/4 times the wavelength of the incident rays of light, wherein m=an even whole number or zero when the beam elements are in the first configuration and m=an odd number when the beam elements are in the second configuration.
摘要翻译： 一种用于调制入射光线的调制器，所述调制器包括多个等间隔开的光束元件，每个光束元件包括光反射平面。 元件彼此平行地布置，其光反射表面彼此平行。 调制器包括用于相对于彼此支撑光束元件的装置和用于相对于彼此移动光束元件的装置，使得光束在第一配置之间移动，其中调制器作为反射作为平面镜的入射光线， 以及第二配置，其中调制器衍射入射的光线，因为它们被反射。 梁元件和下面的基底的至少一个相对表面被配置成减少当它们被拉在一起时粘合的任何倾向。 在操作中，光束元件的光反射表面在第一和第二构造中保持彼此平行，并且相邻光束元件的反射表面之间的垂直间隔等于入射光线的波长的m / 光，其中当波束元素处于第一配置时，m =偶数或零，并且当波束元处于第二配置时m =奇数。
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3.发明授权Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 失效制造用于调制光束的可变形光栅装置的方法，并且包括用于消除光栅元件和下面的衬底之间的静电的装置
公开(公告)号：US5677783A
公开(公告)日：1997-10-14
申请号：US404139
申请日：1995-03-13
CPC分类号： B81B3/001 , G02B26/0808 , G02B5/1828 , B81C2201/115 , Y10S359/90
摘要： A modulator for modulating incident rays of light, the modulator comprising a plurality of equally spaced apart beam elements, each of which includes a light reflective planar surface. The elements are arranged parallel to each other with their light reflective surfaces parallel to each other. The modulator includes means for supporting the beam elements in relation to one another and means for moving the beam elements relative to one another so that the beams move between a first configuration wherein the modulator acts to reflect the incident rays of light as a plane mirror, and a second configuration wherein the modulator diffracts the incident rays of light as they are reflected therefrom. In operation, the light reflective surfaces of the beam elements remain parallel to each other in both the first and the second configurations and the perpendicular spacing between the reflective surfaces of adjacent beam elements is equal to m/4 times the wavelength of the incident rays of light, wherein m=an even whole number or zero when the beam elements are in the first configuration and m=an odd number when the beam elements are in the second configuration.
摘要翻译： 一种用于调制入射光线的调制器，所述调制器包括多个等间隔开的光束元件，每个光束元件包括光反射平面。 元件彼此平行地布置，其光反射表面彼此平行。 调制器包括用于相对于彼此支撑光束元件的装置和用于相对于彼此移动光束元件的装置，使得光束在第一配置之间移动，其中调制器作为反射作为平面镜的入射光线， 以及第二配置，其中调制器衍射入射的光线，因为它们被反射。 在操作中，光束元件的光反射表面在第一和第二构造中保持彼此平行，并且相邻光束元件的反射表面之间的垂直间隔等于入射光线的波长的m / 光，其中当波束元素处于第一配置时，m =偶数或零，并且当波束元处于第二配置时m =奇数。
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公开(公告)号：US5311360A
公开(公告)日：1994-05-10
申请号：US876078
申请日：1992-04-28
CPC分类号： B81B3/001 , G02B26/0808 , G02B5/1828 , B81C2201/115 , Y10S359/90
摘要： A modulator for modulating an incident beam of light, the modulator comprising a plurality of equally spaced-apart elements, each of which includes a light-reflective planar surface. The elements are arranged parallel to each other with their light-reflective surfaces parallel to each other. The modulator includes means for supporting the elements in relation to one another and means for moving particular ones of the elements relative to others so that the moved elements transit between a first configuration wherein the modulator acts to reflect the incident beam of light as a plane mirror, and a second configuration wherein the modulator diffracts the light reflected therefrom. In operation the light-reflective surfaces of the elements remain parallel to each other in both the first and second configurations. The perpendicular spacing between the reflective surfaces of the respective elements is equal to m/4 .times. the wavelength of the incident beam of light, wherein m equals an even whole number or zero when the elements are in the first configuration and m equals an odd whole number when the elements are in the second configuration.
摘要翻译： 一种用于调制入射光束的调制器，所述调制器包括多个等间隔开的元件，每个元件包括光反射平面表面。 元件彼此平行配置，其光反射表面彼此平行。 调制器包括用于相对于彼此支撑元件的装置和用于相对于其它元件移动元件中的特定元件的装置，使得移动元件在第一配置之间转换，其中调制器作用以将入射光束反射为平面镜 以及其中调制器衍射从其反射的光的第二配置。 在操作中，元件的光反射表面在第一和第二构造中保持彼此平行。 各个元件的反射表面之间的垂直间距等于入射光束的波长m / 4x，其中当元件处于第一配置时，m等于偶数整数或零，并且m等于奇数整数 当元素处于第二配置时的数字。
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