公开(公告)号：US07872741B2

公开(公告)日：2011-01-18

申请号：US12071362

申请日：2008-02-20

申请人： Sen-Yih Chou ,  Shu-Ping Dong ,  Wei-Te Hsu ,  Deh-Ming Shyu ,  Chia-Lin Wu ,  Yi-Sha Ku ,  Chang-Hai Sung

发明人： Sen-Yih Chou ,  Shu-Ping Dong ,  Wei-Te Hsu ,  Deh-Ming Shyu ,  Chia-Lin Wu ,  Yi-Sha Ku ,  Chang-Hai Sung

IPC分类号： G01N21/00

CPC分类号： G01N21/47 ,  G01N2021/4709 ,  G02B21/02 ,  G02B21/06

摘要： A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.

摘要翻译： 公开了用于散射场微观测量的方法和装置。 该方法集成了散射仪和明视野显微镜，使测量精度优于光学衍射极限。 利用上述方法和装置，通过使用LCoS（硅上液晶）或DMD（数字微镜装置）进行均匀光的处理来生成检测光束，DMD（数字微镜装置）是指向后焦平面上的图像 测量对象物体上的检测光束产生的散射光束聚焦在平面上，形成由阵列型检测装置检测出的光信号。 检测光束可以通过调制装置定向，以多个不同的角度对物体进行照射，从而可以收集在不同入射角处的平面不同位置的零级或更高阶衍射强度。

公开(公告)号：US20090079969A1

公开(公告)日：2009-03-26

申请号：US12071362

申请日：2008-02-20

申请人： Sen-Yih Chou ,  Shu-Ping Dong ,  Wei-Te Hsu ,  Deh-Ming Shyu ,  Chia-Lin Wu ,  Yi-Sha Ku ,  Chang-Hai Sung

发明人： Sen-Yih Chou ,  Shu-Ping Dong ,  Wei-Te Hsu ,  Deh-Ming Shyu ,  Chia-Lin Wu ,  Yi-Sha Ku ,  Chang-Hai Sung

IPC分类号： G01N21/00

CPC分类号： G01N21/47 ,  G01N2021/4709 ,  G02B21/02 ,  G02B21/06

摘要： A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.

摘要翻译： 公开了用于散射场微观测量的方法和装置。 该方法集成了散射仪和明视野显微镜，使测量精度优于光学衍射极限。 利用上述方法和装置，通过使用LCoS（硅上液晶）或DMD（数字微镜装置）进行均匀光的处理来生成检测光束，DMD（数字微镜装置）是指向后焦平面上的图像 测量对象物体上的检测光束产生的散射光束聚焦在平面上，形成由阵列型检测装置检测出的光信号。 检测光束可以通过调制装置定向，以多个不同的角度对物体进行照射，从而可以收集在不同入射角处的平面不同位置的零级或更高阶衍射强度。

公开(公告)号：US07864324B2

公开(公告)日：2011-01-04

申请号：US12352069

申请日：2009-01-12

申请人： Deh-Ming Shyu ,  Yi-Sha Ku ,  Sen-Yih Chou ,  Shu-Ping Dong ,  Wei-Te Hsu

发明人： Deh-Ming Shyu ,  Yi-Sha Ku ,  Sen-Yih Chou ,  Shu-Ping Dong ,  Wei-Te Hsu

IPC分类号： G01N21/47

CPC分类号： G01N21/4788 ,  G01B2210/56 ,  G01N21/474 ,  G01N21/956 ,  G01N2201/0636 ,  G03F7/70625

摘要： A reflective scatterometer capable of measuring a sample is provided. The reflective scatterometer includes a paraboloid mirror, a light source, a first reflector, a second reflector and a detector. The paraboloid mirror has an optical axis and a parabolic surface, wherein the sample is disposed on the focal point of the parabolic surface and the normal direction of the sample is parallel with the optical axis. A collimated beam generated from the light source is reflected by the first reflector to the parabolic surface and then is reflected by the parabolic surface to the sample to form a first diffracted beam. The first diffracted beam is reflected by the parabolic surface to the second reflector and is then reflected by the second reflector to the detector.

摘要翻译： 提供了能够测量样品的反射式散射仪。 反射式散射仪包括抛物面镜，光源，第一反射器，第二反射器和检测器。 抛物面镜具有光轴和抛物面，其中样品设置在抛物面的焦点上，并且样品的法线方向与光轴平行。 从光源产生的准直光束被第一反射器反射到抛物线表面，然后被抛物面反射到样品以形成第一衍射光束。 第一衍射光束被抛物面反射到第二反射器，然后被第二反射器反射到检测器。

公开(公告)号：US08319971B2

公开(公告)日：2012-11-27

申请号：US12187057

申请日：2008-08-06

申请人： Deh-Ming Shyu ,  Sen-Yih Chou ,  Yi-Sha Ku

发明人： Deh-Ming Shyu ,  Sen-Yih Chou ,  Yi-Sha Ku

IPC分类号： G01N21/55

CPC分类号： G02B21/0016 ,  G01N21/47 ,  G01N21/9501 ,  G02B21/082 ,  G02F1/1313 ,  G02F2001/291 ,  G02F2001/294 ,  G02F2203/12 ,  G02F2203/28

摘要： The present invention provides a scatterfield microscopical measuring method and apparatus, which combine scatterfield detecting technology into microscopical device so that the microscopical device is capable of measuring the sample whose dimension is under the limit of optical diffraction. The scatterfield microscopical measuring apparatus is capable of being controlled to focus uniform and collimated light beam on back focal plane of an objective lens disposed above the sample. By changing the position of the focus position on the back focal plane, it is capable of being adjusted to change the incident angle with respect to the sample.

摘要翻译： 本发明提供了一种将散射场检测技术结合到微观器件中的散射场微观测量方法和装置，使得微观器件能够测量尺寸在光学衍射极限下的样品。 散射场显微测量装置能够被控制以将均匀和准直的光束聚焦在设置在样品上方的物镜的后焦平面上。 通过改变焦点位置在后焦平面上的位置，能够调整相对于样品的入射角度的变化。

公开(公告)号：US20100007881A1

公开(公告)日：2010-01-14

申请号：US12187057

申请日：2008-08-06

申请人： Deh-Ming Shyu ,  Sen-Yih Chou ,  Yi-Sha Ku

发明人： Deh-Ming Shyu ,  Sen-Yih Chou ,  Yi-Sha Ku

IPC分类号： G01J4/00 ,  G02B21/06

CPC分类号： G02B21/0016 ,  G01N21/47 ,  G01N21/9501 ,  G02B21/082 ,  G02F1/1313 ,  G02F2001/291 ,  G02F2001/294 ,  G02F2203/12 ,  G02F2203/28

摘要： The present invention provides a scatterfield microscopical measuring method and apparatus, which combine scatterfield detecting technology into microscopical device so that the microscopical device is capable of measuring the sample whose dimension is under the limit of optical diffraction. The scatterfield microscopical measuring apparatus is capable of being controlled to focus uniform and collimated light beam on back focal plane of an objective lens disposed above the sample. By changing the position of the focus position on the back focal plane, it is capable of being adjusted to change the incident angle with respect to the sample.

摘要翻译： 本发明提供了一种将散射场检测技术结合到微观器件中的散射场微观测量方法和装置，使得微观器件能够测量尺寸在光学衍射极限下的样品。 散射场显微测量装置能够被控制以将均匀和准直的光束聚焦在设置在样品上方的物镜的后焦平面上。 通过改变焦点位置在后焦平面上的位置，能够调整相对于样品的入射角度的变化。

公开(公告)号：US08334908B2

公开(公告)日：2012-12-18

申请号：US12840056

申请日：2010-07-20

申请人： Ming-Jhe Du ,  Sen-Yih Chou

发明人： Ming-Jhe Du ,  Sen-Yih Chou

IPC分类号： H04N17/00

CPC分类号： G01S7/4814 ,  G01S17/89

摘要： The present invention provides a method and system for high dynamic range image measurement which is configured to control the light intensity distribution through an optical modulating switch for adjusting the intensity of the light passing therethrough so as to control the light intensity distribution of the light projecting on an object or of the object light being sensed by a photo detector for preventing the optical sensing signals of the photo detector from over-saturating. After that, the optical sensing signals are compensated according to the optical intensity distribution modulated by the optical modulating switch so as to obtain an image data with high dynamic range.

摘要翻译： 本发明提供了一种用于高动态范围图像测量的方法和系统，其被配置为通过光调制开关来控制光强度分布，以调节通过其中的光的强度，以便控制投射到光的光的光强分布 由光检测器感测到的物体或物体的光，以防止光电检测器的光学感测信号过度饱和。 之后，根据由光调制开关调制的光强度分布来补偿光学感测信号，以获得具有高动态范围的图像数据。

公开(公告)号：US20110109750A1

公开(公告)日：2011-05-12

申请号：US12840056

申请日：2010-07-20

申请人： Ming-Jhe Du ,  Sen-Yih Chou

发明人： Ming-Jhe Du ,  Sen-Yih Chou

IPC分类号： H04N9/68 ,  H04N17/00

CPC分类号： G01S7/4814 ,  G01S17/89

摘要： The present invention provides a method and system for high dynamic range image measurement which is configured to control the light intensity distribution through an optical modulating switch for adjusting the intensity of the light passing therethrough so as to control the light intensity distribution of the light projecting on an object or of the object light being sensed by a photo detector for preventing the optical sensing signals of the photo detector from over-saturating. After that, the optical sensing signals are compensated according to the optical intensity distribution modulated by the optical modulating switch so as to obtain an image data with high dynamic range.

摘要翻译： 本发明提供了一种用于高动态范围图像测量的方法和系统，其被配置为通过光调制开关来控制光强度分布，以调节通过其中的光的强度，以便控制投射到光的光的光强分布 由光检测器感测到的物体或物体的光，以防止光电检测器的光学感测信号过度饱和。 之后，根据由光调制开关调制的光强度分布来补偿光学感测信号，以获得具有高动态范围的图像数据。