公开(公告)号：US20210102288A1

公开(公告)日：2021-04-08

申请号：US17099565

申请日：2020-11-16

Applicant: Delft University of Technology

Inventor： Jan Rudolf VAN OMMEN

IPC: C23C16/44 ,  C23C16/455 ,  B01J8/18 ,  C23C16/442

Abstract: The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.

公开(公告)号：US20180073138A1

公开(公告)日：2018-03-15

申请号：US15813840

申请日：2017-11-15

Applicant: Delft University of Technology

Inventor： Jan Rudolf VAN OMMEN

IPC: C23C16/44 ,  C23C16/455

CPC classification number: C23C16/4417 ,  C23C16/45525 ,  C23C16/45551

Abstract: The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.

公开(公告)号：US20230340665A1

公开(公告)日：2023-10-26

申请号：US18217741

申请日：2023-07-03

Applicant: Delft University of Technology

Inventor： Jan Rudolf VAN OMMEN

IPC: C23C16/44 ,  C23C16/455 ,  B01J8/18 ,  C23C16/442

CPC classification number: C23C16/4417 ,  C23C16/45525 ,  C23C16/45551 ,  B01J8/18 ,  C23C16/442

Abstract: The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.