-
公开(公告)号:US09307624B2
公开(公告)日:2016-04-05
申请号:US12484812
申请日:2009-06-15
申请人: Denis Alexandrovich Glushkov , Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Konstantin Nikolaevich Koshelev , Givi Georgievich Zukakishvili , Vladimir Mihailovitch Krivtsun , Yurii Victorovitch Sidelnikov , Kurt Gielissen , Oleg Yakushev
发明人: Denis Alexandrovich Glushkov , Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Konstantin Nikolaevich Koshelev , Givi Georgievich Zukakishvili , Vladimir Mihailovitch Krivtsun , Yurii Victorovitch Sidelnikov , Kurt Gielissen , Oleg Yakushev
CPC分类号: H05G2/003 , G03F7/70033 , H05G2/008
摘要: A discharge produced plasma radiation source includes a laser beam pulse generator configured to provide a laser beam pulse to trigger a pinch in a plasma of the discharge produced plasma radiation source. The laser beam pulse generator is arranged to provide a laser beam pulse having an energy greater than an optimum laser beam pulse energy that corresponds to a maximum output of a given wavelength of radiation for a given discharge energy.
摘要翻译: 放电产生的等离子体辐射源包括激光束脉冲发生器,其被配置为提供激光束脉冲以触发放电产生的等离子体辐射源的等离子体中的夹点。 激光束脉冲发生器被布置成提供具有大于对于给定放电能量的给定波长的辐射的最大输出的最佳激光束脉冲能量的能量的激光束脉冲。