公开(公告)号：US20240347306A1

公开(公告)日：2024-10-17

申请号：US18294251

申请日：2022-06-23

Applicant: Denka Company Limited ,  NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Hiromitsu CHATANI ,  Daisuke ISHIKAWA ,  Jie TANG ,  Tadakatsu OHKUBO ,  Shuai TANG ,  Jun UZUHASHI ,  Kazuhiro HONO

IPC: H01J1/02 ,  H01J9/02

CPC classification number: H01J1/02 ,  H01J9/02

Abstract: A manufacturing method for an electron source according to the present disclosure includes steps of: (A) cutting out a chip from a block of an electron emission material, (B) fixing a first end portion of the chip to a distal end of a support needle, and (C) sharpening a second end portion of the chip. The step (A) includes forming first and second grooves which constitute first and second surfaces of the chip in the block by irradiating a surface of the block with an ion beam. The first end portion of the chip includes the first surface and the second surface with the surfaces forming an angle α of 10 to 90°. The step (B) includes forming a joint between the distal end of the support needle and the first end portion of the chip.

公开(公告)号：US20220406552A1

公开(公告)日：2022-12-22

申请号：US17768017

申请日：2020-10-20

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jie TANG ,  Shuai TANG ,  Ta-Wei CHIU ,  Tadakatsu OHKUBO ,  Jun UZUHASHI ,  Kazuhiro HONO ,  Luchang QIN

IPC: H01J9/02 ,  H01J1/02

Abstract: The present invention provides a simpler method for sharpening a tip of an emitter. In addition, the present invention provides an emitter including a nanoneedle made of a single crystal material, an emitter including a nanowire made of a single crystal material such as hafnium carbide (HfC), both of which stably emit electrons with high efficiency, and an electron gun and an electronic device using any one of these emitters. A method for manufacturing the emitter according to an embodiment of the present invention comprises processing a single crystal material in a vacuum using a focused ion beam to form an end of the single crystal material, through which electrons are to be emitted, into a tapered shape, wherein the processing is performed in an environment in which a periphery of the single crystal material fixed to a support is opened.

公开(公告)号：US20240079198A1

公开(公告)日：2024-03-07

申请号：US17622994

申请日：2020-06-29

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jie TANG ,  Shuai TANG ,  Ta-Wei CHIU ,  Wataru HAYAMI ,  Luchang QIN

IPC: H01J37/065

CPC classification number: H01J37/065 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: The present invention provides an emitter made of a hafnium carbide (HfC) single crystal that stably emits electrons with high efficiency, a method for manufacturing the emitter, and an electron gun and an electronic device using the emitter. An emitter according to an embodiment of the present invention is an emitter including a nanowire, in which the nanowire is made of the hafnium carbide (HfC) single crystal, at least an end of the nanowire through which electrons are to be emitted is coated with hafnium oxycarbide (HfC1−xOx: 0