公开(公告)号：US20090102316A1

公开(公告)日：2009-04-23

申请号：US12255426

申请日：2008-10-21

申请人： Didier BELOT ,  Andreia CATHELIN ,  Alexandre Augusto SHIRAKAWA ,  Jean-Marie PHAM ,  Pierre JARY ,  Eric KERHERVE

发明人： Didier BELOT ,  Andreia CATHELIN ,  Alexandre Augusto SHIRAKAWA ,  Jean-Marie PHAM ,  Pierre JARY ,  Eric KERHERVE

IPC分类号： H01L41/04

CPC分类号： H03H9/17 ,  H03H9/02228

摘要： A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation: W = n · va lateral f , with   n ∈ N where,valateral is an acoustic propagation speed of Lamb waves, n is an order of a resonance mode of the Lamb waves, f is a resonance frequency of the Lamb wave resonator.

摘要翻译： 兰姆波谐振器包括压电层和抵靠压电层的第一面的第一电极。 第一电极包括指状物和接触臂，每个指状物包括与接触臂接触的第一侧和彼此平行的两个另外的边。 在两个手指之间至少部分蚀刻压电层的一部分以形成凹部。 手指按照以下等式计算的距离W彼此间隔开：