Abstract:
The present invention relates to a fan apparatus for a chamber of a handler which prevents the breakage of a bearing housing by a guide recess and a key slidable to the guide recess along the axis varied due to a thermal stress generated in the axial direction of the fan apparatus according to a change in temperature of the fan apparatus mounted inside the chamber. The fan apparatus includes: a first housing having a first guide recess formed; a second housing contained in the first housing and slidable therein; a bearing being installed inside the second housing and supporting the shaft; a plurality of labyrinths being installed at both sides of the bearing and supporting the bearing; and a push cover covering the second housing inserted into the first housing.
Abstract:
A parts suction head having a non-contact sealing head is disclosed. The head includes: a moving block having first air passages on its upper surface and having a first hollow unit in a longitudinal direction; a spacer having second air passage connected to the first air passage for air flow, and having a second hollow unit in a longitudinal direction; a rotation shaft being inserted into the second hollow unit of the spacer at interval and having third air passage connected to the second air passage for air flow, and having a third hollow unit in a longitudinal direction; and flanges for sealing up an interval between the spacer and the rotation shaft. The rotation shaft is installed in the moving block in a non-contact type by using the spacer to prevent the non-linear frictional force.
Abstract:
The present invention relates to a rotation sensing device of a fan apparatus adapted to a chamber in a handler which can sense whether the fan apparatus is rotated or not by using a sensor dog and an optical sensor. The rotation sensing device includes: a sensor dog being installed at the outer circumferential surface of a shaft installed inside a case and being configured to be spread a predetermined length larger than the diameter of the stop state when a centrifugal force is generated by the rotation of the shaft; an optical sensor receiving light reflected from the surface of the sensor dog and producing a sensing signal of the light if the sensor dog is spread the predetermined length by scanning the light to the sensor dog; and a main controller judging that the fan apparatus is rotated upon receipt of the sensing signal of the light from the optical sensor.
Abstract:
A gripper for parts having different shapes is disclosed. The gripper includes a holder having one end mounted and moved in a socket unit, and having a penetration groove forming a passage of air flown through the socket unit; a piston mounted in the penetration groove, and lifted or lowered due to a pressure of the air flown through the penetration groove; a movement unit having a slanted surface to be horizontally moved in a direction of increasing or decreasing an interval by the piston lifted or lowered; and grip tips for picking up or putting the parts. The grip tips are moved to pick up the parts having the different shape and easily mount the parts on the PCB.
Abstract:
A gripper having a grip tip for parts having different shapes is provided for a surface mount device. The gripper includes a piston installed inside of a through hole formed in a holder, and lifted or lowered by air flown in/out through the through hole, a moving unit connected to fixed blocks of the holder by a connection device configured to increase or decrease an interval according to the lifting or lowering operation of the piston, and multiple grip tips configured to support at least three points of a parts having a different shape.